3/8/2012	10:38:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	10:38:20 AM	Recipe started at 10:38 AM
3/8/2012	10:38:20 AM	Helium valve closed
3/8/2012	10:38:20 AM	H2 valve closed
3/8/2012	10:38:20 AM	BCl3 valve closed
3/8/2012	10:38:20 AM	PH3 valve closed
3/8/2012	10:38:20 AM	SiCl4 pre valve closed
3/8/2012	10:38:20 AM	SiCl4 post valve closed
3/8/2012	10:38:20 AM	Main Vac valve closed
3/8/2012	10:38:20 AM	Bypass valve closed
3/8/2012	10:38:20 AM	Bubbler valve closed
3/8/2012	10:38:20 AM	Helium MFC set to  0.000000
3/8/2012	10:38:20 AM	H2 MFC set to  0.000000
3/8/2012	10:38:20 AM	BCl3 MFC set to  0.000000
3/8/2012	10:38:20 AM	PH3 MFC set to  0.000000
3/8/2012	10:38:20 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:38:20 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:38:20 AM	Tube furnace set to 0
3/8/2012	10:38:23 AM	H2 valve closed
3/8/2012	10:38:23 AM	BCl3 valve closed
3/8/2012	10:38:23 AM	PH3 valve closed
3/8/2012	10:38:23 AM	SiCl4 pre valve closed
3/8/2012	10:38:23 AM	SiCl4 post valve closed
3/8/2012	10:38:23 AM	Main Vac valve closed
3/8/2012	10:38:23 AM	Bypass valve closed
3/8/2012	10:38:23 AM	Bubbler valve closed
3/8/2012	10:38:23 AM	Helium valve opened
3/8/2012	10:38:23 AM	Helium MFC set to  500.000000
3/8/2012	10:38:23 AM	H2 MFC set to  0.000000
3/8/2012	10:38:23 AM	BCl3 MFC set to  0.000000
3/8/2012	10:38:23 AM	PH3 MFC set to  0.000000
3/8/2012	10:38:23 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:38:23 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:38:23 AM	Tube furnace set to 0
3/8/2012	10:39:28 AM	Helium valve closed
3/8/2012	10:39:28 AM	H2 valve closed
3/8/2012	10:39:28 AM	BCl3 valve closed
3/8/2012	10:39:28 AM	PH3 valve closed
3/8/2012	10:39:28 AM	SiCl4 pre valve closed
3/8/2012	10:39:28 AM	SiCl4 post valve closed
3/8/2012	10:39:28 AM	Main Vac valve closed
3/8/2012	10:39:28 AM	Bypass valve closed
3/8/2012	10:39:28 AM	Bubbler valve closed
3/8/2012	10:39:28 AM	Helium MFC set to  0.000000
3/8/2012	10:39:28 AM	H2 MFC set to  0.000000
3/8/2012	10:39:28 AM	BCl3 MFC set to  0.000000
3/8/2012	10:39:28 AM	PH3 MFC set to  0.000000
3/8/2012	10:39:28 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:39:28 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:39:28 AM	Tube furnace set to 0
3/8/2012	10:39:29 AM	Run finished at 10:39 AM
3/8/2012	10:39:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	10:44:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	10:44:01 AM	Recipe started at 10:44 AM
3/8/2012	10:44:01 AM	Helium valve closed
3/8/2012	10:44:01 AM	H2 valve closed
3/8/2012	10:44:01 AM	BCl3 valve closed
3/8/2012	10:44:01 AM	PH3 valve closed
3/8/2012	10:44:01 AM	SiCl4 pre valve closed
3/8/2012	10:44:01 AM	SiCl4 post valve closed
3/8/2012	10:44:01 AM	Main Vac valve closed
3/8/2012	10:44:01 AM	Bubbler valve closed
3/8/2012	10:44:01 AM	Bypass valve opened
3/8/2012	10:44:01 AM	Helium MFC set to  0.000000
3/8/2012	10:44:01 AM	H2 MFC set to  0.000000
3/8/2012	10:44:01 AM	BCl3 MFC set to  0.000000
3/8/2012	10:44:01 AM	PH3 MFC set to  0.000000
3/8/2012	10:44:01 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:44:01 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:44:01 AM	Tube furnace set to 0
3/8/2012	10:45:01 AM	Helium valve closed
3/8/2012	10:45:01 AM	H2 valve closed
3/8/2012	10:45:01 AM	BCl3 valve closed
3/8/2012	10:45:01 AM	PH3 valve closed
3/8/2012	10:45:01 AM	SiCl4 pre valve closed
3/8/2012	10:45:01 AM	SiCl4 post valve closed
3/8/2012	10:45:01 AM	Main Vac valve closed
3/8/2012	10:45:01 AM	Bubbler valve closed
3/8/2012	10:45:01 AM	Bypass valve opened
3/8/2012	10:45:01 AM	Helium MFC set to  0.000000
3/8/2012	10:45:01 AM	H2 MFC set to  0.000000
3/8/2012	10:45:01 AM	BCl3 MFC set to  0.000000
3/8/2012	10:45:01 AM	PH3 MFC set to  0.000000
3/8/2012	10:45:01 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:45:01 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:45:01 AM	Tube furnace set to 0
3/8/2012	10:46:01 AM	Helium valve closed
3/8/2012	10:46:01 AM	H2 valve closed
3/8/2012	10:46:02 AM	BCl3 valve closed
3/8/2012	10:46:02 AM	PH3 valve closed
3/8/2012	10:46:02 AM	SiCl4 pre valve closed
3/8/2012	10:46:02 AM	SiCl4 post valve closed
3/8/2012	10:46:02 AM	Bypass valve closed
3/8/2012	10:46:02 AM	Bubbler valve closed
3/8/2012	10:46:02 AM	Main Vac valve opened
3/8/2012	10:46:02 AM	Helium MFC set to  0.000000
3/8/2012	10:46:02 AM	H2 MFC set to  0.000000
3/8/2012	10:46:02 AM	BCl3 MFC set to  0.000000
3/8/2012	10:46:02 AM	PH3 MFC set to  0.000000
3/8/2012	10:46:02 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:46:02 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:46:02 AM	Tube furnace set to 0
3/8/2012	10:46:03 AM	Run finished at 10:46 AM
3/8/2012	10:46:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	10:46:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	10:46:51 AM	Recipe started at 10:46 AM
3/8/2012	10:46:51 AM	Helium valve closed
3/8/2012	10:46:51 AM	H2 valve closed
3/8/2012	10:46:51 AM	BCl3 valve closed
3/8/2012	10:46:51 AM	PH3 valve closed
3/8/2012	10:46:51 AM	SiCl4 pre valve closed
3/8/2012	10:46:51 AM	SiCl4 post valve closed
3/8/2012	10:46:51 AM	Main Vac valve closed
3/8/2012	10:46:51 AM	Bypass valve closed
3/8/2012	10:46:51 AM	Bubbler valve closed
3/8/2012	10:46:51 AM	Helium MFC set to  0.000000
3/8/2012	10:46:51 AM	H2 MFC set to  0.000000
3/8/2012	10:46:51 AM	BCl3 MFC set to  0.000000
3/8/2012	10:46:51 AM	PH3 MFC set to  0.000000
3/8/2012	10:46:51 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:46:51 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:46:51 AM	Tube furnace set to 0
3/8/2012	10:46:54 AM	H2 valve closed
3/8/2012	10:46:54 AM	BCl3 valve closed
3/8/2012	10:46:54 AM	PH3 valve closed
3/8/2012	10:46:54 AM	SiCl4 pre valve closed
3/8/2012	10:46:54 AM	SiCl4 post valve closed
3/8/2012	10:46:54 AM	Main Vac valve closed
3/8/2012	10:46:54 AM	Bypass valve closed
3/8/2012	10:46:54 AM	Bubbler valve closed
3/8/2012	10:46:54 AM	Helium valve opened
3/8/2012	10:46:54 AM	Helium MFC set to  500.000000
3/8/2012	10:46:54 AM	H2 MFC set to  0.000000
3/8/2012	10:46:54 AM	BCl3 MFC set to  0.000000
3/8/2012	10:46:54 AM	PH3 MFC set to  0.000000
3/8/2012	10:46:54 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:46:54 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:46:54 AM	Tube furnace set to 0
3/8/2012	10:48:00 AM	Helium valve closed
3/8/2012	10:48:00 AM	H2 valve closed
3/8/2012	10:48:00 AM	BCl3 valve closed
3/8/2012	10:48:00 AM	PH3 valve closed
3/8/2012	10:48:00 AM	SiCl4 pre valve closed
3/8/2012	10:48:00 AM	SiCl4 post valve closed
3/8/2012	10:48:00 AM	Main Vac valve closed
3/8/2012	10:48:00 AM	Bypass valve closed
3/8/2012	10:48:00 AM	Bubbler valve closed
3/8/2012	10:48:00 AM	Helium MFC set to  0.000000
3/8/2012	10:48:00 AM	H2 MFC set to  0.000000
3/8/2012	10:48:00 AM	BCl3 MFC set to  0.000000
3/8/2012	10:48:00 AM	PH3 MFC set to  0.000000
3/8/2012	10:48:00 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:48:00 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:48:01 AM	Tube furnace set to 0
3/8/2012	10:48:02 AM	Run finished at 10:48 AM
3/8/2012	10:48:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	10:53:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	10:53:15 AM	Recipe started at 10:53 AM
3/8/2012	10:53:15 AM	Helium valve closed
3/8/2012	10:53:15 AM	H2 valve closed
3/8/2012	10:53:15 AM	BCl3 valve closed
3/8/2012	10:53:15 AM	PH3 valve closed
3/8/2012	10:53:15 AM	SiCl4 pre valve closed
3/8/2012	10:53:15 AM	SiCl4 post valve closed
3/8/2012	10:53:15 AM	Main Vac valve closed
3/8/2012	10:53:15 AM	Bubbler valve closed
3/8/2012	10:53:15 AM	Bypass valve opened
3/8/2012	10:53:15 AM	Helium MFC set to  0.000000
3/8/2012	10:53:15 AM	H2 MFC set to  0.000000
3/8/2012	10:53:15 AM	BCl3 MFC set to  0.000000
3/8/2012	10:53:15 AM	PH3 MFC set to  0.000000
3/8/2012	10:53:15 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:53:15 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:53:15 AM	Tube furnace set to 0
3/8/2012	10:54:18 AM	Helium valve closed
3/8/2012	10:54:18 AM	H2 valve closed
3/8/2012	10:54:18 AM	BCl3 valve closed
3/8/2012	10:54:18 AM	PH3 valve closed
3/8/2012	10:54:18 AM	SiCl4 pre valve closed
3/8/2012	10:54:18 AM	SiCl4 post valve closed
3/8/2012	10:54:18 AM	Main Vac valve closed
3/8/2012	10:54:18 AM	Bubbler valve closed
3/8/2012	10:54:18 AM	Bypass valve opened
3/8/2012	10:54:18 AM	Helium MFC set to  0.000000
3/8/2012	10:54:18 AM	H2 MFC set to  0.000000
3/8/2012	10:54:18 AM	BCl3 MFC set to  0.000000
3/8/2012	10:54:18 AM	PH3 MFC set to  0.000000
3/8/2012	10:54:18 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:54:18 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:54:18 AM	Tube furnace set to 0
3/8/2012	10:55:18 AM	Helium valve closed
3/8/2012	10:55:18 AM	H2 valve closed
3/8/2012	10:55:18 AM	BCl3 valve closed
3/8/2012	10:55:18 AM	PH3 valve closed
3/8/2012	10:55:18 AM	SiCl4 pre valve closed
3/8/2012	10:55:18 AM	SiCl4 post valve closed
3/8/2012	10:55:18 AM	Bypass valve closed
3/8/2012	10:55:18 AM	Bubbler valve closed
3/8/2012	10:55:18 AM	Main Vac valve opened
3/8/2012	10:55:18 AM	Helium MFC set to  0.000000
3/8/2012	10:55:18 AM	H2 MFC set to  0.000000
3/8/2012	10:55:18 AM	BCl3 MFC set to  0.000000
3/8/2012	10:55:18 AM	PH3 MFC set to  0.000000
3/8/2012	10:55:18 AM	SiCl4 MFC set to  0.000000
3/8/2012	10:55:18 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	10:55:19 AM	Tube furnace set to 0
3/8/2012	10:55:20 AM	Run finished at 10:55 AM
3/8/2012	10:55:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	11:29:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	11:29:21 AM	Recipe started at 11:29 AM
3/8/2012	11:29:21 AM	Helium valve closed
3/8/2012	11:29:21 AM	H2 valve closed
3/8/2012	11:29:21 AM	BCl3 valve closed
3/8/2012	11:29:21 AM	PH3 valve closed
3/8/2012	11:29:21 AM	SiCl4 pre valve closed
3/8/2012	11:29:21 AM	SiCl4 post valve closed
3/8/2012	11:29:21 AM	Main Vac valve closed
3/8/2012	11:29:21 AM	Bubbler valve closed
3/8/2012	11:29:21 AM	Bypass valve opened
3/8/2012	11:29:21 AM	Helium MFC set to  0.000000
3/8/2012	11:29:21 AM	H2 MFC set to  0.000000
3/8/2012	11:29:21 AM	BCl3 MFC set to  0.000000
3/8/2012	11:29:21 AM	PH3 MFC set to  0.000000
3/8/2012	11:29:21 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:29:21 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:29:21 AM	Tube furnace set to 0
3/8/2012	11:29:21 AM	Helium valve closed
3/8/2012	11:29:21 AM	H2 valve closed
3/8/2012	11:29:21 AM	BCl3 valve closed
3/8/2012	11:29:21 AM	PH3 valve closed
3/8/2012	11:29:21 AM	SiCl4 pre valve closed
3/8/2012	11:29:21 AM	SiCl4 post valve closed
3/8/2012	11:29:21 AM	Main Vac valve closed
3/8/2012	11:29:21 AM	Bubbler valve closed
3/8/2012	11:29:21 AM	Bypass valve opened
3/8/2012	11:29:21 AM	Helium MFC set to  0.000000
3/8/2012	11:29:21 AM	H2 MFC set to  0.000000
3/8/2012	11:29:21 AM	BCl3 MFC set to  0.000000
3/8/2012	11:29:21 AM	PH3 MFC set to  0.000000
3/8/2012	11:29:22 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:29:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:29:22 AM	Tube furnace set to 0
3/8/2012	11:29:23 AM	Helium valve closed
3/8/2012	11:29:23 AM	H2 valve closed
3/8/2012	11:29:23 AM	BCl3 valve closed
3/8/2012	11:29:23 AM	PH3 valve closed
3/8/2012	11:29:23 AM	SiCl4 pre valve closed
3/8/2012	11:29:23 AM	SiCl4 post valve closed
3/8/2012	11:29:23 AM	Bypass valve closed
3/8/2012	11:29:23 AM	Bubbler valve closed
3/8/2012	11:29:23 AM	Main Vac valve opened
3/8/2012	11:29:23 AM	Helium MFC set to  0.000000
3/8/2012	11:29:23 AM	H2 MFC set to  0.000000
3/8/2012	11:29:23 AM	BCl3 MFC set to  0.000000
3/8/2012	11:29:23 AM	PH3 MFC set to  0.000000
3/8/2012	11:29:23 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:29:23 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:29:23 AM	Tube furnace set to 0
3/8/2012	11:29:24 AM	H2 valve closed
3/8/2012	11:29:24 AM	BCl3 valve closed
3/8/2012	11:29:24 AM	PH3 valve closed
3/8/2012	11:29:24 AM	SiCl4 pre valve closed
3/8/2012	11:29:24 AM	SiCl4 post valve closed
3/8/2012	11:29:24 AM	Bypass valve closed
3/8/2012	11:29:24 AM	Bubbler valve closed
3/8/2012	11:29:24 AM	Helium valve opened
3/8/2012	11:29:24 AM	Main Vac valve opened
3/8/2012	11:29:24 AM	Helium MFC set to  20.000000
3/8/2012	11:29:24 AM	H2 MFC set to  0.000000
3/8/2012	11:29:24 AM	BCl3 MFC set to  0.000000
3/8/2012	11:29:24 AM	PH3 MFC set to  0.000000
3/8/2012	11:29:24 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:29:24 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:29:24 AM	Tube furnace set to 0
3/8/2012	11:29:54 AM	Helium valve closed
3/8/2012	11:29:54 AM	H2 valve closed
3/8/2012	11:29:54 AM	BCl3 valve closed
3/8/2012	11:29:54 AM	PH3 valve closed
3/8/2012	11:29:54 AM	SiCl4 pre valve closed
3/8/2012	11:29:54 AM	SiCl4 post valve closed
3/8/2012	11:29:54 AM	Bypass valve closed
3/8/2012	11:29:54 AM	Bubbler valve closed
3/8/2012	11:29:54 AM	Main Vac valve opened
3/8/2012	11:29:54 AM	Helium MFC set to  0.000000
3/8/2012	11:29:54 AM	H2 MFC set to  0.000000
3/8/2012	11:29:54 AM	BCl3 MFC set to  0.000000
3/8/2012	11:29:54 AM	PH3 MFC set to  0.000000
3/8/2012	11:29:54 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:29:54 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:29:54 AM	Tube furnace set to 0
3/8/2012	11:30:24 AM	H2 valve closed
3/8/2012	11:30:24 AM	BCl3 valve closed
3/8/2012	11:30:24 AM	PH3 valve closed
3/8/2012	11:30:24 AM	SiCl4 pre valve closed
3/8/2012	11:30:24 AM	SiCl4 post valve closed
3/8/2012	11:30:24 AM	Bypass valve closed
3/8/2012	11:30:24 AM	Bubbler valve closed
3/8/2012	11:30:24 AM	Helium valve opened
3/8/2012	11:30:24 AM	Main Vac valve opened
3/8/2012	11:30:24 AM	Helium MFC set to  20.000000
3/8/2012	11:30:24 AM	H2 MFC set to  0.000000
3/8/2012	11:30:24 AM	BCl3 MFC set to  0.000000
3/8/2012	11:30:24 AM	PH3 MFC set to  0.000000
3/8/2012	11:30:24 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:30:24 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:30:24 AM	Tube furnace set to 0
3/8/2012	11:30:55 AM	Helium valve closed
3/8/2012	11:30:55 AM	H2 valve closed
3/8/2012	11:30:55 AM	BCl3 valve closed
3/8/2012	11:30:55 AM	PH3 valve closed
3/8/2012	11:30:55 AM	SiCl4 pre valve closed
3/8/2012	11:30:55 AM	SiCl4 post valve closed
3/8/2012	11:30:55 AM	Bypass valve closed
3/8/2012	11:30:55 AM	Bubbler valve closed
3/8/2012	11:30:55 AM	Main Vac valve opened
3/8/2012	11:30:55 AM	Helium MFC set to  0.000000
3/8/2012	11:30:55 AM	H2 MFC set to  0.000000
3/8/2012	11:30:55 AM	BCl3 MFC set to  0.000000
3/8/2012	11:30:55 AM	PH3 MFC set to  0.000000
3/8/2012	11:30:55 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:30:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:30:55 AM	Tube furnace set to 0
3/8/2012	11:31:25 AM	H2 valve closed
3/8/2012	11:31:25 AM	BCl3 valve closed
3/8/2012	11:31:25 AM	PH3 valve closed
3/8/2012	11:31:25 AM	SiCl4 pre valve closed
3/8/2012	11:31:25 AM	SiCl4 post valve closed
3/8/2012	11:31:25 AM	Bypass valve closed
3/8/2012	11:31:25 AM	Bubbler valve closed
3/8/2012	11:31:25 AM	Helium valve opened
3/8/2012	11:31:25 AM	Main Vac valve opened
3/8/2012	11:31:25 AM	Helium MFC set to  20.000000
3/8/2012	11:31:25 AM	H2 MFC set to  0.000000
3/8/2012	11:31:25 AM	BCl3 MFC set to  0.000000
3/8/2012	11:31:25 AM	PH3 MFC set to  0.000000
3/8/2012	11:31:25 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:31:25 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:31:25 AM	Tube furnace set to 0
3/8/2012	11:31:55 AM	Helium valve closed
3/8/2012	11:31:55 AM	H2 valve closed
3/8/2012	11:31:55 AM	BCl3 valve closed
3/8/2012	11:31:55 AM	PH3 valve closed
3/8/2012	11:31:55 AM	SiCl4 pre valve closed
3/8/2012	11:31:55 AM	SiCl4 post valve closed
3/8/2012	11:31:55 AM	Bypass valve closed
3/8/2012	11:31:55 AM	Bubbler valve closed
3/8/2012	11:31:55 AM	Main Vac valve opened
3/8/2012	11:31:55 AM	Helium MFC set to  0.000000
3/8/2012	11:31:55 AM	H2 MFC set to  0.000000
3/8/2012	11:31:55 AM	BCl3 MFC set to  0.000000
3/8/2012	11:31:55 AM	PH3 MFC set to  0.000000
3/8/2012	11:31:55 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:31:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:31:55 AM	Tube furnace set to 0
3/8/2012	11:32:25 AM	H2 valve closed
3/8/2012	11:32:25 AM	BCl3 valve closed
3/8/2012	11:32:25 AM	PH3 valve closed
3/8/2012	11:32:25 AM	SiCl4 pre valve closed
3/8/2012	11:32:25 AM	SiCl4 post valve closed
3/8/2012	11:32:25 AM	Bypass valve closed
3/8/2012	11:32:25 AM	Bubbler valve closed
3/8/2012	11:32:25 AM	Helium valve opened
3/8/2012	11:32:25 AM	Main Vac valve opened
3/8/2012	11:32:25 AM	Helium MFC set to  20.000000
3/8/2012	11:32:25 AM	H2 MFC set to  0.000000
3/8/2012	11:32:25 AM	BCl3 MFC set to  0.000000
3/8/2012	11:32:25 AM	PH3 MFC set to  0.000000
3/8/2012	11:32:25 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:32:25 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:32:25 AM	Tube furnace set to 0
3/8/2012	11:32:55 AM	Helium valve closed
3/8/2012	11:32:55 AM	H2 valve closed
3/8/2012	11:32:55 AM	BCl3 valve closed
3/8/2012	11:32:55 AM	PH3 valve closed
3/8/2012	11:32:55 AM	SiCl4 pre valve closed
3/8/2012	11:32:55 AM	SiCl4 post valve closed
3/8/2012	11:32:55 AM	Bypass valve closed
3/8/2012	11:32:55 AM	Bubbler valve closed
3/8/2012	11:32:55 AM	Main Vac valve opened
3/8/2012	11:32:55 AM	Helium MFC set to  0.000000
3/8/2012	11:32:55 AM	H2 MFC set to  0.000000
3/8/2012	11:32:55 AM	BCl3 MFC set to  0.000000
3/8/2012	11:32:55 AM	PH3 MFC set to  0.000000
3/8/2012	11:32:55 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:32:55 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:32:55 AM	Tube furnace set to 0
3/8/2012	11:33:26 AM	H2 valve closed
3/8/2012	11:33:26 AM	BCl3 valve closed
3/8/2012	11:33:26 AM	PH3 valve closed
3/8/2012	11:33:26 AM	SiCl4 pre valve closed
3/8/2012	11:33:26 AM	SiCl4 post valve closed
3/8/2012	11:33:26 AM	Bypass valve closed
3/8/2012	11:33:26 AM	Bubbler valve closed
3/8/2012	11:33:26 AM	Helium valve opened
3/8/2012	11:33:26 AM	Main Vac valve opened
3/8/2012	11:33:26 AM	Helium MFC set to  20.000000
3/8/2012	11:33:26 AM	H2 MFC set to  0.000000
3/8/2012	11:33:26 AM	BCl3 MFC set to  0.000000
3/8/2012	11:33:26 AM	PH3 MFC set to  0.000000
3/8/2012	11:33:26 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:33:26 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:33:26 AM	Tube furnace set to 0
3/8/2012	11:33:56 AM	Helium valve closed
3/8/2012	11:33:56 AM	H2 valve closed
3/8/2012	11:33:56 AM	BCl3 valve closed
3/8/2012	11:33:56 AM	PH3 valve closed
3/8/2012	11:33:56 AM	SiCl4 pre valve closed
3/8/2012	11:33:56 AM	SiCl4 post valve closed
3/8/2012	11:33:56 AM	Bypass valve closed
3/8/2012	11:33:56 AM	Bubbler valve closed
3/8/2012	11:33:56 AM	Main Vac valve opened
3/8/2012	11:33:56 AM	Helium MFC set to  0.000000
3/8/2012	11:33:56 AM	H2 MFC set to  0.000000
3/8/2012	11:33:56 AM	BCl3 MFC set to  0.000000
3/8/2012	11:33:56 AM	PH3 MFC set to  0.000000
3/8/2012	11:33:56 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:33:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:33:56 AM	Tube furnace set to 0
3/8/2012	11:34:26 AM	H2 valve closed
3/8/2012	11:34:26 AM	BCl3 valve closed
3/8/2012	11:34:26 AM	PH3 valve closed
3/8/2012	11:34:26 AM	SiCl4 pre valve closed
3/8/2012	11:34:26 AM	SiCl4 post valve closed
3/8/2012	11:34:26 AM	Bypass valve closed
3/8/2012	11:34:26 AM	Bubbler valve closed
3/8/2012	11:34:26 AM	Helium valve opened
3/8/2012	11:34:26 AM	Main Vac valve opened
3/8/2012	11:34:26 AM	Helium MFC set to  20.000000
3/8/2012	11:34:26 AM	H2 MFC set to  0.000000
3/8/2012	11:34:26 AM	BCl3 MFC set to  0.000000
3/8/2012	11:34:26 AM	PH3 MFC set to  0.000000
3/8/2012	11:34:26 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:34:26 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:34:26 AM	Tube furnace set to 0
3/8/2012	11:34:56 AM	Helium valve closed
3/8/2012	11:34:56 AM	H2 valve closed
3/8/2012	11:34:56 AM	BCl3 valve closed
3/8/2012	11:34:56 AM	PH3 valve closed
3/8/2012	11:34:56 AM	SiCl4 pre valve closed
3/8/2012	11:34:56 AM	SiCl4 post valve closed
3/8/2012	11:34:56 AM	Bypass valve closed
3/8/2012	11:34:56 AM	Bubbler valve closed
3/8/2012	11:34:56 AM	Main Vac valve opened
3/8/2012	11:34:56 AM	Helium MFC set to  0.000000
3/8/2012	11:34:56 AM	H2 MFC set to  0.000000
3/8/2012	11:34:56 AM	BCl3 MFC set to  0.000000
3/8/2012	11:34:56 AM	PH3 MFC set to  0.000000
3/8/2012	11:34:56 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:34:56 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:34:56 AM	Tube furnace set to 0
3/8/2012	11:35:26 AM	H2 valve closed
3/8/2012	11:35:26 AM	BCl3 valve closed
3/8/2012	11:35:26 AM	PH3 valve closed
3/8/2012	11:35:26 AM	SiCl4 pre valve closed
3/8/2012	11:35:26 AM	SiCl4 post valve closed
3/8/2012	11:35:26 AM	Bypass valve closed
3/8/2012	11:35:26 AM	Bubbler valve closed
3/8/2012	11:35:26 AM	Helium valve opened
3/8/2012	11:35:26 AM	Main Vac valve opened
3/8/2012	11:35:26 AM	Helium MFC set to  20.000000
3/8/2012	11:35:26 AM	H2 MFC set to  0.000000
3/8/2012	11:35:26 AM	BCl3 MFC set to  0.000000
3/8/2012	11:35:26 AM	PH3 MFC set to  0.000000
3/8/2012	11:35:26 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:35:26 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:35:27 AM	Tube furnace set to 0
3/8/2012	11:35:57 AM	Helium valve closed
3/8/2012	11:35:57 AM	H2 valve closed
3/8/2012	11:35:57 AM	BCl3 valve closed
3/8/2012	11:35:57 AM	PH3 valve closed
3/8/2012	11:35:57 AM	SiCl4 pre valve closed
3/8/2012	11:35:57 AM	SiCl4 post valve closed
3/8/2012	11:35:57 AM	Bypass valve closed
3/8/2012	11:35:57 AM	Bubbler valve closed
3/8/2012	11:35:57 AM	Main Vac valve opened
3/8/2012	11:35:57 AM	Helium MFC set to  0.000000
3/8/2012	11:35:57 AM	H2 MFC set to  0.000000
3/8/2012	11:35:57 AM	BCl3 MFC set to  0.000000
3/8/2012	11:35:57 AM	PH3 MFC set to  0.000000
3/8/2012	11:35:57 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:35:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:35:57 AM	Tube furnace set to 0
3/8/2012	11:36:27 AM	H2 valve closed
3/8/2012	11:36:27 AM	BCl3 valve closed
3/8/2012	11:36:27 AM	PH3 valve closed
3/8/2012	11:36:27 AM	SiCl4 pre valve closed
3/8/2012	11:36:27 AM	SiCl4 post valve closed
3/8/2012	11:36:27 AM	Bypass valve closed
3/8/2012	11:36:27 AM	Bubbler valve closed
3/8/2012	11:36:27 AM	Helium valve opened
3/8/2012	11:36:27 AM	Main Vac valve opened
3/8/2012	11:36:27 AM	Helium MFC set to  20.000000
3/8/2012	11:36:27 AM	H2 MFC set to  0.000000
3/8/2012	11:36:27 AM	BCl3 MFC set to  0.000000
3/8/2012	11:36:27 AM	PH3 MFC set to  0.000000
3/8/2012	11:36:27 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:36:27 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:36:27 AM	Tube furnace set to 0
3/8/2012	11:36:57 AM	Helium valve closed
3/8/2012	11:36:57 AM	H2 valve closed
3/8/2012	11:36:57 AM	BCl3 valve closed
3/8/2012	11:36:57 AM	PH3 valve closed
3/8/2012	11:36:57 AM	SiCl4 pre valve closed
3/8/2012	11:36:57 AM	SiCl4 post valve closed
3/8/2012	11:36:57 AM	Bypass valve closed
3/8/2012	11:36:57 AM	Bubbler valve closed
3/8/2012	11:36:57 AM	Main Vac valve opened
3/8/2012	11:36:57 AM	Helium MFC set to  0.000000
3/8/2012	11:36:57 AM	H2 MFC set to  0.000000
3/8/2012	11:36:57 AM	BCl3 MFC set to  0.000000
3/8/2012	11:36:57 AM	PH3 MFC set to  0.000000
3/8/2012	11:36:57 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:36:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:36:57 AM	Tube furnace set to 0
3/8/2012	11:37:27 AM	H2 valve closed
3/8/2012	11:37:27 AM	BCl3 valve closed
3/8/2012	11:37:27 AM	PH3 valve closed
3/8/2012	11:37:27 AM	SiCl4 pre valve closed
3/8/2012	11:37:27 AM	SiCl4 post valve closed
3/8/2012	11:37:27 AM	Bypass valve closed
3/8/2012	11:37:27 AM	Bubbler valve closed
3/8/2012	11:37:27 AM	Helium valve opened
3/8/2012	11:37:27 AM	Main Vac valve opened
3/8/2012	11:37:27 AM	Helium MFC set to  20.000000
3/8/2012	11:37:27 AM	H2 MFC set to  0.000000
3/8/2012	11:37:27 AM	BCl3 MFC set to  0.000000
3/8/2012	11:37:27 AM	PH3 MFC set to  0.000000
3/8/2012	11:37:27 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:37:27 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:37:27 AM	Tube furnace set to 0
3/8/2012	11:37:57 AM	Helium valve closed
3/8/2012	11:37:57 AM	H2 valve closed
3/8/2012	11:37:57 AM	BCl3 valve closed
3/8/2012	11:37:57 AM	PH3 valve closed
3/8/2012	11:37:57 AM	SiCl4 pre valve closed
3/8/2012	11:37:57 AM	SiCl4 post valve closed
3/8/2012	11:37:57 AM	Bypass valve closed
3/8/2012	11:37:57 AM	Bubbler valve closed
3/8/2012	11:37:57 AM	Main Vac valve opened
3/8/2012	11:37:57 AM	Helium MFC set to  0.000000
3/8/2012	11:37:57 AM	H2 MFC set to  0.000000
3/8/2012	11:37:57 AM	BCl3 MFC set to  0.000000
3/8/2012	11:37:57 AM	PH3 MFC set to  0.000000
3/8/2012	11:37:57 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:37:57 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:37:58 AM	Tube furnace set to 0
3/8/2012	11:38:28 AM	H2 valve closed
3/8/2012	11:38:28 AM	BCl3 valve closed
3/8/2012	11:38:28 AM	PH3 valve closed
3/8/2012	11:38:28 AM	SiCl4 pre valve closed
3/8/2012	11:38:28 AM	SiCl4 post valve closed
3/8/2012	11:38:28 AM	Bypass valve closed
3/8/2012	11:38:28 AM	Bubbler valve closed
3/8/2012	11:38:28 AM	Helium valve opened
3/8/2012	11:38:28 AM	Main Vac valve opened
3/8/2012	11:38:28 AM	Helium MFC set to  20.000000
3/8/2012	11:38:28 AM	H2 MFC set to  0.000000
3/8/2012	11:38:28 AM	BCl3 MFC set to  0.000000
3/8/2012	11:38:28 AM	PH3 MFC set to  0.000000
3/8/2012	11:38:28 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:38:28 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:38:28 AM	Tube furnace set to 0
3/8/2012	11:38:58 AM	Helium valve closed
3/8/2012	11:38:58 AM	H2 valve closed
3/8/2012	11:38:58 AM	BCl3 valve closed
3/8/2012	11:38:58 AM	PH3 valve closed
3/8/2012	11:38:58 AM	SiCl4 pre valve closed
3/8/2012	11:38:58 AM	SiCl4 post valve closed
3/8/2012	11:38:58 AM	Bypass valve closed
3/8/2012	11:38:58 AM	Bubbler valve closed
3/8/2012	11:38:58 AM	Main Vac valve opened
3/8/2012	11:38:58 AM	Helium MFC set to  0.000000
3/8/2012	11:38:58 AM	H2 MFC set to  0.000000
3/8/2012	11:38:58 AM	BCl3 MFC set to  0.000000
3/8/2012	11:38:58 AM	PH3 MFC set to  0.000000
3/8/2012	11:38:58 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:38:58 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:38:58 AM	Tube furnace set to 0
3/8/2012	11:38:59 AM	Run finished at 11:38 AM
3/8/2012	11:38:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	11:49:57 AM	Main Vac valve closed
3/8/2012	11:50:17 AM	Main Vac valve opened
3/8/2012	11:52:10 AM	Recipe started at 11:52 AM
3/8/2012	11:52:10 AM	Helium valve closed
3/8/2012	11:52:10 AM	H2 valve closed
3/8/2012	11:52:10 AM	BCl3 valve closed
3/8/2012	11:52:10 AM	PH3 valve closed
3/8/2012	11:52:10 AM	SiCl4 pre valve closed
3/8/2012	11:52:10 AM	SiCl4 post valve closed
3/8/2012	11:52:10 AM	Main Vac valve closed
3/8/2012	11:52:10 AM	Bypass valve closed
3/8/2012	11:52:10 AM	Bubbler valve closed
3/8/2012	11:52:10 AM	Helium MFC set to  0.000000
3/8/2012	11:52:10 AM	H2 MFC set to  0.000000
3/8/2012	11:52:10 AM	BCl3 MFC set to  0.000000
3/8/2012	11:52:10 AM	PH3 MFC set to  0.000000
3/8/2012	11:52:10 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:52:10 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:52:10 AM	Tube furnace set to 0
3/8/2012	11:52:13 AM	Helium valve closed
3/8/2012	11:52:13 AM	BCl3 valve closed
3/8/2012	11:52:13 AM	PH3 valve closed
3/8/2012	11:52:13 AM	SiCl4 pre valve closed
3/8/2012	11:52:13 AM	SiCl4 post valve closed
3/8/2012	11:52:13 AM	Main Vac valve closed
3/8/2012	11:52:13 AM	Bypass valve closed
3/8/2012	11:52:13 AM	Bubbler valve closed
3/8/2012	11:52:13 AM	H2 valve opened
3/8/2012	11:52:13 AM	Helium MFC set to  0.000000
3/8/2012	11:52:13 AM	H2 MFC set to  500.000000
3/8/2012	11:52:13 AM	BCl3 MFC set to  0.000000
3/8/2012	11:52:13 AM	PH3 MFC set to  0.000000
3/8/2012	11:52:13 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:52:13 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:52:13 AM	Tube furnace set to 0
3/8/2012	11:53:20 AM	Helium valve closed
3/8/2012	11:53:20 AM	BCl3 valve closed
3/8/2012	11:53:20 AM	PH3 valve closed
3/8/2012	11:53:20 AM	SiCl4 pre valve closed
3/8/2012	11:53:20 AM	SiCl4 post valve closed
3/8/2012	11:53:20 AM	Main Vac valve closed
3/8/2012	11:53:20 AM	Bypass valve closed
3/8/2012	11:53:20 AM	H2 valve opened
3/8/2012	11:53:20 AM	Bubbler valve opened
3/8/2012	11:53:20 AM	Helium MFC set to  0.000000
3/8/2012	11:53:20 AM	H2 MFC set to  500.000000
3/8/2012	11:53:20 AM	BCl3 MFC set to  0.000000
3/8/2012	11:53:20 AM	PH3 MFC set to  0.000000
3/8/2012	11:53:20 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:53:20 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:53:21 AM	Tube furnace set to 0
3/8/2012	11:53:22 AM	Helium valve closed
3/8/2012	11:53:22 AM	BCl3 valve closed
3/8/2012	11:53:22 AM	PH3 valve closed
3/8/2012	11:53:22 AM	SiCl4 pre valve closed
3/8/2012	11:53:22 AM	SiCl4 post valve closed
3/8/2012	11:53:22 AM	Main Vac valve closed
3/8/2012	11:53:22 AM	Bypass valve closed
3/8/2012	11:53:22 AM	H2 valve opened
3/8/2012	11:53:22 AM	Bubbler valve opened
3/8/2012	11:53:22 AM	Helium MFC set to  0.000000
3/8/2012	11:53:22 AM	H2 MFC set to  500.000000
3/8/2012	11:53:22 AM	BCl3 MFC set to  0.000000
3/8/2012	11:53:22 AM	PH3 MFC set to  0.000000
3/8/2012	11:53:22 AM	SiCl4 MFC set to  0.000000
3/8/2012	11:53:22 AM	Bypass solenoid MFC set to  0.000000
3/8/2012	11:53:22 AM	Tube furnace set to 950
3/8/2012	12:13:22 PM	Helium valve closed
3/8/2012	12:13:22 PM	PH3 valve closed
3/8/2012	12:13:22 PM	Main Vac valve closed
3/8/2012	12:13:22 PM	Bypass valve closed
3/8/2012	12:13:22 PM	H2 valve opened
3/8/2012	12:13:22 PM	BCl3 valve opened
3/8/2012	12:13:22 PM	SiCl4 pre valve opened
3/8/2012	12:13:22 PM	SiCl4 post valve opened
3/8/2012	12:13:22 PM	Bubbler valve opened
3/8/2012	12:13:22 PM	Helium MFC set to  0.000000
3/8/2012	12:13:22 PM	H2 MFC set to  500.000000
3/8/2012	12:13:22 PM	BCl3 MFC set to  1.000000
3/8/2012	12:13:22 PM	PH3 MFC set to  0.000000
3/8/2012	12:13:22 PM	SiCl4 MFC set to  25.000000
3/8/2012	12:13:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	12:13:22 PM	Tube furnace set to 950
3/8/2012	12:33:22 PM	Helium valve closed
3/8/2012	12:33:22 PM	BCl3 valve closed
3/8/2012	12:33:22 PM	PH3 valve closed
3/8/2012	12:33:22 PM	SiCl4 pre valve closed
3/8/2012	12:33:22 PM	SiCl4 post valve closed
3/8/2012	12:33:22 PM	Main Vac valve closed
3/8/2012	12:33:22 PM	Bypass valve closed
3/8/2012	12:33:22 PM	H2 valve opened
3/8/2012	12:33:22 PM	Bubbler valve opened
3/8/2012	12:33:22 PM	Helium MFC set to  0.000000
3/8/2012	12:33:22 PM	H2 MFC set to  500.000000
3/8/2012	12:33:22 PM	BCl3 MFC set to  0.000000
3/8/2012	12:33:22 PM	PH3 MFC set to  0.000000
3/8/2012	12:33:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	12:33:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	12:33:22 PM	Tube furnace set to 750
3/8/2012	12:38:22 PM	H2 valve closed
3/8/2012	12:38:22 PM	BCl3 valve closed
3/8/2012	12:38:22 PM	PH3 valve closed
3/8/2012	12:38:22 PM	SiCl4 pre valve closed
3/8/2012	12:38:22 PM	SiCl4 post valve closed
3/8/2012	12:38:22 PM	Main Vac valve closed
3/8/2012	12:38:22 PM	Bypass valve closed
3/8/2012	12:38:22 PM	Helium valve opened
3/8/2012	12:38:22 PM	Bubbler valve opened
3/8/2012	12:38:22 PM	Helium MFC set to  500.000000
3/8/2012	12:38:22 PM	H2 MFC set to  0.000000
3/8/2012	12:38:22 PM	BCl3 MFC set to  0.000000
3/8/2012	12:38:22 PM	PH3 MFC set to  0.000000
3/8/2012	12:38:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	12:38:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	12:38:22 PM	Tube furnace set to 0
3/8/2012	12:58:22 PM	Helium valve closed
3/8/2012	12:58:22 PM	H2 valve closed
3/8/2012	12:58:22 PM	BCl3 valve closed
3/8/2012	12:58:22 PM	PH3 valve closed
3/8/2012	12:58:22 PM	SiCl4 pre valve closed
3/8/2012	12:58:22 PM	SiCl4 post valve closed
3/8/2012	12:58:22 PM	Main Vac valve closed
3/8/2012	12:58:22 PM	Bypass valve closed
3/8/2012	12:58:22 PM	Bubbler valve closed
3/8/2012	12:58:22 PM	Helium MFC set to  0.000000
3/8/2012	12:58:22 PM	H2 MFC set to  0.000000
3/8/2012	12:58:22 PM	BCl3 MFC set to  0.000000
3/8/2012	12:58:22 PM	PH3 MFC set to  0.000000
3/8/2012	12:58:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	12:58:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	12:58:23 PM	Tube furnace set to 0
3/8/2012	12:58:24 PM	Run finished at 12:58 PM
3/8/2012	2:06:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	2:06:32 PM	Recipe started at 2:06 PM
3/8/2012	2:06:32 PM	Helium valve closed
3/8/2012	2:06:32 PM	H2 valve closed
3/8/2012	2:06:32 PM	BCl3 valve closed
3/8/2012	2:06:32 PM	PH3 valve closed
3/8/2012	2:06:32 PM	SiCl4 pre valve closed
3/8/2012	2:06:32 PM	SiCl4 post valve closed
3/8/2012	2:06:32 PM	Main Vac valve closed
3/8/2012	2:06:32 PM	Bypass valve closed
3/8/2012	2:06:32 PM	Bubbler valve closed
3/8/2012	2:06:32 PM	Helium MFC set to  0.000000
3/8/2012	2:06:32 PM	H2 MFC set to  0.000000
3/8/2012	2:06:32 PM	BCl3 MFC set to  0.000000
3/8/2012	2:06:32 PM	PH3 MFC set to  0.000000
3/8/2012	2:06:32 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:06:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:06:32 PM	Tube furnace set to 0
3/8/2012	2:06:35 PM	H2 valve closed
3/8/2012	2:06:35 PM	BCl3 valve closed
3/8/2012	2:06:35 PM	PH3 valve closed
3/8/2012	2:06:35 PM	SiCl4 pre valve closed
3/8/2012	2:06:35 PM	SiCl4 post valve closed
3/8/2012	2:06:35 PM	Main Vac valve closed
3/8/2012	2:06:35 PM	Bypass valve closed
3/8/2012	2:06:35 PM	Bubbler valve closed
3/8/2012	2:06:35 PM	Helium valve opened
3/8/2012	2:06:35 PM	Helium MFC set to  500.000000
3/8/2012	2:06:35 PM	H2 MFC set to  0.000000
3/8/2012	2:06:35 PM	BCl3 MFC set to  0.000000
3/8/2012	2:06:35 PM	PH3 MFC set to  0.000000
3/8/2012	2:06:35 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:06:35 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:06:35 PM	Tube furnace set to 0
3/8/2012	2:06:38 PM	Helium valve closed
3/8/2012	2:06:38 PM	H2 valve closed
3/8/2012	2:06:38 PM	BCl3 valve closed
3/8/2012	2:06:38 PM	PH3 valve closed
3/8/2012	2:06:38 PM	SiCl4 pre valve closed
3/8/2012	2:06:38 PM	SiCl4 post valve closed
3/8/2012	2:06:38 PM	Main Vac valve closed
3/8/2012	2:06:38 PM	Bypass valve closed
3/8/2012	2:06:38 PM	Bubbler valve closed
3/8/2012	2:06:38 PM	Helium MFC set to  0.000000
3/8/2012	2:06:38 PM	H2 MFC set to  0.000000
3/8/2012	2:06:38 PM	BCl3 MFC set to  0.000000
3/8/2012	2:06:38 PM	PH3 MFC set to  0.000000
3/8/2012	2:06:38 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:06:38 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:06:38 PM	Tube furnace set to 0
3/8/2012	2:06:39 PM	Run finished at 2:06 PM
3/8/2012	2:06:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	2:12:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	2:12:09 PM	Recipe started at 2:12 PM
3/8/2012	2:12:09 PM	Helium valve closed
3/8/2012	2:12:09 PM	H2 valve closed
3/8/2012	2:12:09 PM	BCl3 valve closed
3/8/2012	2:12:09 PM	PH3 valve closed
3/8/2012	2:12:09 PM	SiCl4 pre valve closed
3/8/2012	2:12:09 PM	SiCl4 post valve closed
3/8/2012	2:12:09 PM	Main Vac valve closed
3/8/2012	2:12:09 PM	Bubbler valve closed
3/8/2012	2:12:09 PM	Bypass valve opened
3/8/2012	2:12:09 PM	Helium MFC set to  0.000000
3/8/2012	2:12:09 PM	H2 MFC set to  0.000000
3/8/2012	2:12:09 PM	BCl3 MFC set to  0.000000
3/8/2012	2:12:09 PM	PH3 MFC set to  0.000000
3/8/2012	2:12:09 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:12:09 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:12:10 PM	Tube furnace set to 0
3/8/2012	2:13:11 PM	Helium valve closed
3/8/2012	2:13:11 PM	H2 valve closed
3/8/2012	2:13:11 PM	BCl3 valve closed
3/8/2012	2:13:11 PM	PH3 valve closed
3/8/2012	2:13:11 PM	SiCl4 pre valve closed
3/8/2012	2:13:11 PM	SiCl4 post valve closed
3/8/2012	2:13:11 PM	Main Vac valve closed
3/8/2012	2:13:11 PM	Bubbler valve closed
3/8/2012	2:13:11 PM	Bypass valve opened
3/8/2012	2:13:11 PM	Helium MFC set to  0.000000
3/8/2012	2:13:11 PM	H2 MFC set to  0.000000
3/8/2012	2:13:11 PM	BCl3 MFC set to  0.000000
3/8/2012	2:13:11 PM	PH3 MFC set to  0.000000
3/8/2012	2:13:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:13:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:13:11 PM	Tube furnace set to 0
3/8/2012	2:14:11 PM	Helium valve closed
3/8/2012	2:14:11 PM	H2 valve closed
3/8/2012	2:14:11 PM	BCl3 valve closed
3/8/2012	2:14:11 PM	PH3 valve closed
3/8/2012	2:14:11 PM	SiCl4 pre valve closed
3/8/2012	2:14:11 PM	SiCl4 post valve closed
3/8/2012	2:14:11 PM	Bypass valve closed
3/8/2012	2:14:11 PM	Bubbler valve closed
3/8/2012	2:14:11 PM	Main Vac valve opened
3/8/2012	2:14:11 PM	Helium MFC set to  0.000000
3/8/2012	2:14:11 PM	H2 MFC set to  0.000000
3/8/2012	2:14:11 PM	BCl3 MFC set to  0.000000
3/8/2012	2:14:11 PM	PH3 MFC set to  0.000000
3/8/2012	2:14:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:14:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:14:11 PM	Tube furnace set to 0
3/8/2012	2:14:12 PM	Run finished at 2:14 PM
3/8/2012	2:14:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	2:37:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	2:37:27 PM	Recipe started at 2:37 PM
3/8/2012	2:37:27 PM	Helium valve closed
3/8/2012	2:37:27 PM	H2 valve closed
3/8/2012	2:37:27 PM	BCl3 valve closed
3/8/2012	2:37:27 PM	PH3 valve closed
3/8/2012	2:37:27 PM	SiCl4 pre valve closed
3/8/2012	2:37:27 PM	SiCl4 post valve closed
3/8/2012	2:37:27 PM	Main Vac valve closed
3/8/2012	2:37:27 PM	Bubbler valve closed
3/8/2012	2:37:27 PM	Bypass valve opened
3/8/2012	2:37:27 PM	Helium MFC set to  0.000000
3/8/2012	2:37:27 PM	H2 MFC set to  0.000000
3/8/2012	2:37:27 PM	BCl3 MFC set to  0.000000
3/8/2012	2:37:27 PM	PH3 MFC set to  0.000000
3/8/2012	2:37:27 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:37:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:37:28 PM	Tube furnace set to 0
3/8/2012	2:37:28 PM	Helium valve closed
3/8/2012	2:37:28 PM	H2 valve closed
3/8/2012	2:37:28 PM	BCl3 valve closed
3/8/2012	2:37:28 PM	PH3 valve closed
3/8/2012	2:37:28 PM	SiCl4 pre valve closed
3/8/2012	2:37:28 PM	SiCl4 post valve closed
3/8/2012	2:37:28 PM	Main Vac valve closed
3/8/2012	2:37:28 PM	Bubbler valve closed
3/8/2012	2:37:28 PM	Bypass valve opened
3/8/2012	2:37:28 PM	Helium MFC set to  0.000000
3/8/2012	2:37:28 PM	H2 MFC set to  0.000000
3/8/2012	2:37:28 PM	BCl3 MFC set to  0.000000
3/8/2012	2:37:28 PM	PH3 MFC set to  0.000000
3/8/2012	2:37:28 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:37:28 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:37:28 PM	Tube furnace set to 0
3/8/2012	2:37:58 PM	Helium valve closed
3/8/2012	2:37:58 PM	H2 valve closed
3/8/2012	2:37:58 PM	BCl3 valve closed
3/8/2012	2:37:58 PM	PH3 valve closed
3/8/2012	2:37:58 PM	SiCl4 pre valve closed
3/8/2012	2:37:58 PM	SiCl4 post valve closed
3/8/2012	2:37:58 PM	Bypass valve closed
3/8/2012	2:37:58 PM	Bubbler valve closed
3/8/2012	2:37:58 PM	Main Vac valve opened
3/8/2012	2:37:58 PM	Helium MFC set to  0.000000
3/8/2012	2:37:58 PM	H2 MFC set to  0.000000
3/8/2012	2:37:58 PM	BCl3 MFC set to  0.000000
3/8/2012	2:37:58 PM	PH3 MFC set to  0.000000
3/8/2012	2:37:58 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:37:58 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:37:58 PM	Tube furnace set to 0
3/8/2012	2:38:28 PM	H2 valve closed
3/8/2012	2:38:28 PM	BCl3 valve closed
3/8/2012	2:38:28 PM	PH3 valve closed
3/8/2012	2:38:28 PM	SiCl4 pre valve closed
3/8/2012	2:38:28 PM	SiCl4 post valve closed
3/8/2012	2:38:28 PM	Bypass valve closed
3/8/2012	2:38:28 PM	Bubbler valve closed
3/8/2012	2:38:28 PM	Helium valve opened
3/8/2012	2:38:28 PM	Main Vac valve opened
3/8/2012	2:38:28 PM	Helium MFC set to  20.000000
3/8/2012	2:38:28 PM	H2 MFC set to  0.000000
3/8/2012	2:38:28 PM	BCl3 MFC set to  0.000000
3/8/2012	2:38:28 PM	PH3 MFC set to  0.000000
3/8/2012	2:38:28 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:38:28 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:38:28 PM	Tube furnace set to 0
3/8/2012	2:38:58 PM	Helium valve closed
3/8/2012	2:38:59 PM	H2 valve closed
3/8/2012	2:38:59 PM	BCl3 valve closed
3/8/2012	2:38:59 PM	PH3 valve closed
3/8/2012	2:38:59 PM	SiCl4 pre valve closed
3/8/2012	2:38:59 PM	SiCl4 post valve closed
3/8/2012	2:38:59 PM	Bypass valve closed
3/8/2012	2:38:59 PM	Bubbler valve closed
3/8/2012	2:38:59 PM	Main Vac valve opened
3/8/2012	2:38:59 PM	Helium MFC set to  0.000000
3/8/2012	2:38:59 PM	H2 MFC set to  0.000000
3/8/2012	2:38:59 PM	BCl3 MFC set to  0.000000
3/8/2012	2:38:59 PM	PH3 MFC set to  0.000000
3/8/2012	2:38:59 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:38:59 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:38:59 PM	Tube furnace set to 0
3/8/2012	2:39:29 PM	H2 valve closed
3/8/2012	2:39:29 PM	BCl3 valve closed
3/8/2012	2:39:29 PM	PH3 valve closed
3/8/2012	2:39:29 PM	SiCl4 pre valve closed
3/8/2012	2:39:29 PM	SiCl4 post valve closed
3/8/2012	2:39:29 PM	Bypass valve closed
3/8/2012	2:39:29 PM	Bubbler valve closed
3/8/2012	2:39:29 PM	Helium valve opened
3/8/2012	2:39:29 PM	Main Vac valve opened
3/8/2012	2:39:29 PM	Helium MFC set to  20.000000
3/8/2012	2:39:29 PM	H2 MFC set to  0.000000
3/8/2012	2:39:29 PM	BCl3 MFC set to  0.000000
3/8/2012	2:39:29 PM	PH3 MFC set to  0.000000
3/8/2012	2:39:29 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:39:29 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:39:29 PM	Tube furnace set to 0
3/8/2012	2:39:59 PM	Helium valve closed
3/8/2012	2:39:59 PM	H2 valve closed
3/8/2012	2:39:59 PM	BCl3 valve closed
3/8/2012	2:39:59 PM	PH3 valve closed
3/8/2012	2:39:59 PM	SiCl4 pre valve closed
3/8/2012	2:39:59 PM	SiCl4 post valve closed
3/8/2012	2:39:59 PM	Bypass valve closed
3/8/2012	2:39:59 PM	Bubbler valve closed
3/8/2012	2:39:59 PM	Main Vac valve opened
3/8/2012	2:39:59 PM	Helium MFC set to  0.000000
3/8/2012	2:39:59 PM	H2 MFC set to  0.000000
3/8/2012	2:39:59 PM	BCl3 MFC set to  0.000000
3/8/2012	2:39:59 PM	PH3 MFC set to  0.000000
3/8/2012	2:39:59 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:39:59 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:39:59 PM	Tube furnace set to 0
3/8/2012	2:40:29 PM	H2 valve closed
3/8/2012	2:40:29 PM	BCl3 valve closed
3/8/2012	2:40:29 PM	PH3 valve closed
3/8/2012	2:40:29 PM	SiCl4 pre valve closed
3/8/2012	2:40:29 PM	SiCl4 post valve closed
3/8/2012	2:40:29 PM	Bypass valve closed
3/8/2012	2:40:29 PM	Bubbler valve closed
3/8/2012	2:40:29 PM	Helium valve opened
3/8/2012	2:40:29 PM	Main Vac valve opened
3/8/2012	2:40:29 PM	Helium MFC set to  20.000000
3/8/2012	2:40:29 PM	H2 MFC set to  0.000000
3/8/2012	2:40:29 PM	BCl3 MFC set to  0.000000
3/8/2012	2:40:29 PM	PH3 MFC set to  0.000000
3/8/2012	2:40:29 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:40:29 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:40:29 PM	Tube furnace set to 0
3/8/2012	2:40:59 PM	Helium valve closed
3/8/2012	2:40:59 PM	H2 valve closed
3/8/2012	2:40:59 PM	BCl3 valve closed
3/8/2012	2:40:59 PM	PH3 valve closed
3/8/2012	2:40:59 PM	SiCl4 pre valve closed
3/8/2012	2:40:59 PM	SiCl4 post valve closed
3/8/2012	2:40:59 PM	Bypass valve closed
3/8/2012	2:40:59 PM	Bubbler valve closed
3/8/2012	2:40:59 PM	Main Vac valve opened
3/8/2012	2:40:59 PM	Helium MFC set to  0.000000
3/8/2012	2:40:59 PM	H2 MFC set to  0.000000
3/8/2012	2:40:59 PM	BCl3 MFC set to  0.000000
3/8/2012	2:40:59 PM	PH3 MFC set to  0.000000
3/8/2012	2:40:59 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:40:59 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:40:59 PM	Tube furnace set to 0
3/8/2012	2:41:30 PM	H2 valve closed
3/8/2012	2:41:30 PM	BCl3 valve closed
3/8/2012	2:41:30 PM	PH3 valve closed
3/8/2012	2:41:30 PM	SiCl4 pre valve closed
3/8/2012	2:41:30 PM	SiCl4 post valve closed
3/8/2012	2:41:30 PM	Bypass valve closed
3/8/2012	2:41:30 PM	Bubbler valve closed
3/8/2012	2:41:30 PM	Helium valve opened
3/8/2012	2:41:30 PM	Main Vac valve opened
3/8/2012	2:41:30 PM	Helium MFC set to  20.000000
3/8/2012	2:41:30 PM	H2 MFC set to  0.000000
3/8/2012	2:41:30 PM	BCl3 MFC set to  0.000000
3/8/2012	2:41:30 PM	PH3 MFC set to  0.000000
3/8/2012	2:41:30 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:41:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:41:30 PM	Tube furnace set to 0
3/8/2012	2:42:00 PM	Helium valve closed
3/8/2012	2:42:00 PM	H2 valve closed
3/8/2012	2:42:00 PM	BCl3 valve closed
3/8/2012	2:42:00 PM	PH3 valve closed
3/8/2012	2:42:00 PM	SiCl4 pre valve closed
3/8/2012	2:42:00 PM	SiCl4 post valve closed
3/8/2012	2:42:00 PM	Bypass valve closed
3/8/2012	2:42:00 PM	Bubbler valve closed
3/8/2012	2:42:00 PM	Main Vac valve opened
3/8/2012	2:42:00 PM	Helium MFC set to  0.000000
3/8/2012	2:42:00 PM	H2 MFC set to  0.000000
3/8/2012	2:42:00 PM	BCl3 MFC set to  0.000000
3/8/2012	2:42:00 PM	PH3 MFC set to  0.000000
3/8/2012	2:42:00 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:42:00 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:42:00 PM	Tube furnace set to 0
3/8/2012	2:42:30 PM	H2 valve closed
3/8/2012	2:42:30 PM	BCl3 valve closed
3/8/2012	2:42:30 PM	PH3 valve closed
3/8/2012	2:42:30 PM	SiCl4 pre valve closed
3/8/2012	2:42:30 PM	SiCl4 post valve closed
3/8/2012	2:42:30 PM	Bypass valve closed
3/8/2012	2:42:30 PM	Bubbler valve closed
3/8/2012	2:42:30 PM	Helium valve opened
3/8/2012	2:42:30 PM	Main Vac valve opened
3/8/2012	2:42:30 PM	Helium MFC set to  20.000000
3/8/2012	2:42:30 PM	H2 MFC set to  0.000000
3/8/2012	2:42:30 PM	BCl3 MFC set to  0.000000
3/8/2012	2:42:30 PM	PH3 MFC set to  0.000000
3/8/2012	2:42:30 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:42:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:42:30 PM	Tube furnace set to 0
3/8/2012	2:43:00 PM	Helium valve closed
3/8/2012	2:43:00 PM	H2 valve closed
3/8/2012	2:43:00 PM	BCl3 valve closed
3/8/2012	2:43:00 PM	PH3 valve closed
3/8/2012	2:43:00 PM	SiCl4 pre valve closed
3/8/2012	2:43:00 PM	SiCl4 post valve closed
3/8/2012	2:43:00 PM	Bypass valve closed
3/8/2012	2:43:00 PM	Bubbler valve closed
3/8/2012	2:43:00 PM	Main Vac valve opened
3/8/2012	2:43:00 PM	Helium MFC set to  0.000000
3/8/2012	2:43:00 PM	H2 MFC set to  0.000000
3/8/2012	2:43:00 PM	BCl3 MFC set to  0.000000
3/8/2012	2:43:00 PM	PH3 MFC set to  0.000000
3/8/2012	2:43:00 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:43:00 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:43:00 PM	Tube furnace set to 0
3/8/2012	2:43:30 PM	H2 valve closed
3/8/2012	2:43:30 PM	BCl3 valve closed
3/8/2012	2:43:30 PM	PH3 valve closed
3/8/2012	2:43:30 PM	SiCl4 pre valve closed
3/8/2012	2:43:30 PM	SiCl4 post valve closed
3/8/2012	2:43:30 PM	Bypass valve closed
3/8/2012	2:43:30 PM	Bubbler valve closed
3/8/2012	2:43:30 PM	Helium valve opened
3/8/2012	2:43:30 PM	Main Vac valve opened
3/8/2012	2:43:30 PM	Helium MFC set to  20.000000
3/8/2012	2:43:30 PM	H2 MFC set to  0.000000
3/8/2012	2:43:30 PM	BCl3 MFC set to  0.000000
3/8/2012	2:43:30 PM	PH3 MFC set to  0.000000
3/8/2012	2:43:30 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:43:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:43:31 PM	Tube furnace set to 0
3/8/2012	2:44:01 PM	Helium valve closed
3/8/2012	2:44:01 PM	H2 valve closed
3/8/2012	2:44:01 PM	BCl3 valve closed
3/8/2012	2:44:01 PM	PH3 valve closed
3/8/2012	2:44:01 PM	SiCl4 pre valve closed
3/8/2012	2:44:01 PM	SiCl4 post valve closed
3/8/2012	2:44:01 PM	Bypass valve closed
3/8/2012	2:44:01 PM	Bubbler valve closed
3/8/2012	2:44:01 PM	Main Vac valve opened
3/8/2012	2:44:01 PM	Helium MFC set to  0.000000
3/8/2012	2:44:01 PM	H2 MFC set to  0.000000
3/8/2012	2:44:01 PM	BCl3 MFC set to  0.000000
3/8/2012	2:44:01 PM	PH3 MFC set to  0.000000
3/8/2012	2:44:01 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:44:01 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:44:01 PM	Tube furnace set to 0
3/8/2012	2:44:31 PM	H2 valve closed
3/8/2012	2:44:31 PM	BCl3 valve closed
3/8/2012	2:44:31 PM	PH3 valve closed
3/8/2012	2:44:31 PM	SiCl4 pre valve closed
3/8/2012	2:44:31 PM	SiCl4 post valve closed
3/8/2012	2:44:31 PM	Bypass valve closed
3/8/2012	2:44:31 PM	Bubbler valve closed
3/8/2012	2:44:31 PM	Helium valve opened
3/8/2012	2:44:31 PM	Main Vac valve opened
3/8/2012	2:44:31 PM	Helium MFC set to  20.000000
3/8/2012	2:44:31 PM	H2 MFC set to  0.000000
3/8/2012	2:44:31 PM	BCl3 MFC set to  0.000000
3/8/2012	2:44:31 PM	PH3 MFC set to  0.000000
3/8/2012	2:44:31 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:44:31 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:44:31 PM	Tube furnace set to 0
3/8/2012	2:45:01 PM	Helium valve closed
3/8/2012	2:45:01 PM	H2 valve closed
3/8/2012	2:45:01 PM	BCl3 valve closed
3/8/2012	2:45:01 PM	PH3 valve closed
3/8/2012	2:45:01 PM	SiCl4 pre valve closed
3/8/2012	2:45:01 PM	SiCl4 post valve closed
3/8/2012	2:45:01 PM	Bypass valve closed
3/8/2012	2:45:01 PM	Bubbler valve closed
3/8/2012	2:45:01 PM	Main Vac valve opened
3/8/2012	2:45:01 PM	Helium MFC set to  0.000000
3/8/2012	2:45:01 PM	H2 MFC set to  0.000000
3/8/2012	2:45:01 PM	BCl3 MFC set to  0.000000
3/8/2012	2:45:01 PM	PH3 MFC set to  0.000000
3/8/2012	2:45:01 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:45:01 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:45:01 PM	Tube furnace set to 0
3/8/2012	2:45:31 PM	H2 valve closed
3/8/2012	2:45:31 PM	BCl3 valve closed
3/8/2012	2:45:31 PM	PH3 valve closed
3/8/2012	2:45:31 PM	SiCl4 pre valve closed
3/8/2012	2:45:31 PM	SiCl4 post valve closed
3/8/2012	2:45:31 PM	Bypass valve closed
3/8/2012	2:45:31 PM	Bubbler valve closed
3/8/2012	2:45:31 PM	Helium valve opened
3/8/2012	2:45:31 PM	Main Vac valve opened
3/8/2012	2:45:31 PM	Helium MFC set to  20.000000
3/8/2012	2:45:31 PM	H2 MFC set to  0.000000
3/8/2012	2:45:31 PM	BCl3 MFC set to  0.000000
3/8/2012	2:45:31 PM	PH3 MFC set to  0.000000
3/8/2012	2:45:31 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:45:31 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:45:31 PM	Tube furnace set to 0
3/8/2012	2:46:01 PM	Helium valve closed
3/8/2012	2:46:01 PM	H2 valve closed
3/8/2012	2:46:01 PM	BCl3 valve closed
3/8/2012	2:46:01 PM	PH3 valve closed
3/8/2012	2:46:01 PM	SiCl4 pre valve closed
3/8/2012	2:46:01 PM	SiCl4 post valve closed
3/8/2012	2:46:01 PM	Bypass valve closed
3/8/2012	2:46:01 PM	Bubbler valve closed
3/8/2012	2:46:01 PM	Main Vac valve opened
3/8/2012	2:46:01 PM	Helium MFC set to  0.000000
3/8/2012	2:46:01 PM	H2 MFC set to  0.000000
3/8/2012	2:46:01 PM	BCl3 MFC set to  0.000000
3/8/2012	2:46:01 PM	PH3 MFC set to  0.000000
3/8/2012	2:46:01 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:46:01 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:46:02 PM	Tube furnace set to 0
3/8/2012	2:46:32 PM	H2 valve closed
3/8/2012	2:46:32 PM	BCl3 valve closed
3/8/2012	2:46:32 PM	PH3 valve closed
3/8/2012	2:46:32 PM	SiCl4 pre valve closed
3/8/2012	2:46:32 PM	SiCl4 post valve closed
3/8/2012	2:46:32 PM	Bypass valve closed
3/8/2012	2:46:32 PM	Bubbler valve closed
3/8/2012	2:46:32 PM	Helium valve opened
3/8/2012	2:46:32 PM	Main Vac valve opened
3/8/2012	2:46:32 PM	Helium MFC set to  20.000000
3/8/2012	2:46:32 PM	H2 MFC set to  0.000000
3/8/2012	2:46:32 PM	BCl3 MFC set to  0.000000
3/8/2012	2:46:32 PM	PH3 MFC set to  0.000000
3/8/2012	2:46:32 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:46:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:46:32 PM	Tube furnace set to 0
3/8/2012	2:47:02 PM	Helium valve closed
3/8/2012	2:47:02 PM	H2 valve closed
3/8/2012	2:47:02 PM	BCl3 valve closed
3/8/2012	2:47:02 PM	PH3 valve closed
3/8/2012	2:47:02 PM	SiCl4 pre valve closed
3/8/2012	2:47:02 PM	SiCl4 post valve closed
3/8/2012	2:47:02 PM	Bypass valve closed
3/8/2012	2:47:02 PM	Bubbler valve closed
3/8/2012	2:47:02 PM	Main Vac valve opened
3/8/2012	2:47:02 PM	Helium MFC set to  0.000000
3/8/2012	2:47:02 PM	H2 MFC set to  0.000000
3/8/2012	2:47:02 PM	BCl3 MFC set to  0.000000
3/8/2012	2:47:02 PM	PH3 MFC set to  0.000000
3/8/2012	2:47:02 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:47:02 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:47:02 PM	Tube furnace set to 0
3/8/2012	2:47:32 PM	H2 valve closed
3/8/2012	2:47:32 PM	BCl3 valve closed
3/8/2012	2:47:32 PM	PH3 valve closed
3/8/2012	2:47:32 PM	SiCl4 pre valve closed
3/8/2012	2:47:32 PM	SiCl4 post valve closed
3/8/2012	2:47:32 PM	Bypass valve closed
3/8/2012	2:47:32 PM	Bubbler valve closed
3/8/2012	2:47:32 PM	Helium valve opened
3/8/2012	2:47:32 PM	Main Vac valve opened
3/8/2012	2:47:32 PM	Helium MFC set to  20.000000
3/8/2012	2:47:32 PM	H2 MFC set to  0.000000
3/8/2012	2:47:32 PM	BCl3 MFC set to  0.000000
3/8/2012	2:47:32 PM	PH3 MFC set to  0.000000
3/8/2012	2:47:32 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:47:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:47:32 PM	Tube furnace set to 0
3/8/2012	2:48:02 PM	Helium valve closed
3/8/2012	2:48:02 PM	H2 valve closed
3/8/2012	2:48:02 PM	BCl3 valve closed
3/8/2012	2:48:02 PM	PH3 valve closed
3/8/2012	2:48:02 PM	SiCl4 pre valve closed
3/8/2012	2:48:02 PM	SiCl4 post valve closed
3/8/2012	2:48:02 PM	Bypass valve closed
3/8/2012	2:48:02 PM	Bubbler valve closed
3/8/2012	2:48:02 PM	Main Vac valve opened
3/8/2012	2:48:02 PM	Helium MFC set to  0.000000
3/8/2012	2:48:02 PM	H2 MFC set to  0.000000
3/8/2012	2:48:02 PM	BCl3 MFC set to  0.000000
3/8/2012	2:48:02 PM	PH3 MFC set to  0.000000
3/8/2012	2:48:02 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:48:02 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:48:02 PM	Tube furnace set to 0
3/8/2012	2:48:03 PM	Run finished at 2:48 PM
3/8/2012	2:48:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	2:48:44 PM	Main Vac valve closed
3/8/2012	2:48:51 PM	Main Vac valve opened
3/8/2012	2:49:04 PM	Main Vac valve closed
3/8/2012	2:49:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	2:49:27 PM	Recipe started at 2:49 PM
3/8/2012	2:49:27 PM	Helium valve closed
3/8/2012	2:49:27 PM	H2 valve closed
3/8/2012	2:49:27 PM	BCl3 valve closed
3/8/2012	2:49:27 PM	PH3 valve closed
3/8/2012	2:49:27 PM	SiCl4 pre valve closed
3/8/2012	2:49:27 PM	SiCl4 post valve closed
3/8/2012	2:49:27 PM	Main Vac valve closed
3/8/2012	2:49:27 PM	Bubbler valve closed
3/8/2012	2:49:27 PM	Bypass valve opened
3/8/2012	2:49:27 PM	Helium MFC set to  0.000000
3/8/2012	2:49:27 PM	H2 MFC set to  0.000000
3/8/2012	2:49:27 PM	BCl3 MFC set to  0.000000
3/8/2012	2:49:27 PM	PH3 MFC set to  0.000000
3/8/2012	2:49:27 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:49:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:49:27 PM	Tube furnace set to 0
3/8/2012	2:49:27 PM	Helium valve closed
3/8/2012	2:49:27 PM	H2 valve closed
3/8/2012	2:49:27 PM	BCl3 valve closed
3/8/2012	2:49:27 PM	PH3 valve closed
3/8/2012	2:49:27 PM	SiCl4 pre valve closed
3/8/2012	2:49:27 PM	SiCl4 post valve closed
3/8/2012	2:49:27 PM	Main Vac valve closed
3/8/2012	2:49:27 PM	Bubbler valve closed
3/8/2012	2:49:27 PM	Bypass valve opened
3/8/2012	2:49:27 PM	Helium MFC set to  0.000000
3/8/2012	2:49:27 PM	H2 MFC set to  0.000000
3/8/2012	2:49:27 PM	BCl3 MFC set to  0.000000
3/8/2012	2:49:27 PM	PH3 MFC set to  0.000000
3/8/2012	2:49:27 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:49:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:49:28 PM	Tube furnace set to 0
3/8/2012	2:49:37 PM	Helium valve closed
3/8/2012	2:49:37 PM	H2 valve closed
3/8/2012	2:49:37 PM	BCl3 valve closed
3/8/2012	2:49:37 PM	PH3 valve closed
3/8/2012	2:49:37 PM	SiCl4 pre valve closed
3/8/2012	2:49:37 PM	SiCl4 post valve closed
3/8/2012	2:49:37 PM	Bypass valve closed
3/8/2012	2:49:37 PM	Bubbler valve closed
3/8/2012	2:49:37 PM	Main Vac valve opened
3/8/2012	2:49:37 PM	Helium MFC set to  0.000000
3/8/2012	2:49:37 PM	H2 MFC set to  0.000000
3/8/2012	2:49:37 PM	BCl3 MFC set to  0.000000
3/8/2012	2:49:37 PM	PH3 MFC set to  0.000000
3/8/2012	2:49:37 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:49:37 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:49:37 PM	Tube furnace set to 0
3/8/2012	2:50:07 PM	H2 valve closed
3/8/2012	2:50:07 PM	BCl3 valve closed
3/8/2012	2:50:07 PM	PH3 valve closed
3/8/2012	2:50:07 PM	SiCl4 pre valve closed
3/8/2012	2:50:07 PM	SiCl4 post valve closed
3/8/2012	2:50:07 PM	Bypass valve closed
3/8/2012	2:50:07 PM	Bubbler valve closed
3/8/2012	2:50:07 PM	Helium valve opened
3/8/2012	2:50:07 PM	Main Vac valve opened
3/8/2012	2:50:07 PM	Helium MFC set to  20.000000
3/8/2012	2:50:07 PM	H2 MFC set to  0.000000
3/8/2012	2:50:07 PM	BCl3 MFC set to  0.000000
3/8/2012	2:50:07 PM	PH3 MFC set to  0.000000
3/8/2012	2:50:07 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:50:07 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:50:08 PM	Tube furnace set to 0
3/8/2012	2:50:38 PM	Helium valve closed
3/8/2012	2:50:38 PM	H2 valve closed
3/8/2012	2:50:38 PM	BCl3 valve closed
3/8/2012	2:50:38 PM	PH3 valve closed
3/8/2012	2:50:38 PM	SiCl4 pre valve closed
3/8/2012	2:50:38 PM	SiCl4 post valve closed
3/8/2012	2:50:38 PM	Bypass valve closed
3/8/2012	2:50:38 PM	Bubbler valve closed
3/8/2012	2:50:38 PM	Main Vac valve opened
3/8/2012	2:50:38 PM	Helium MFC set to  0.000000
3/8/2012	2:50:38 PM	H2 MFC set to  0.000000
3/8/2012	2:50:38 PM	BCl3 MFC set to  0.000000
3/8/2012	2:50:38 PM	PH3 MFC set to  0.000000
3/8/2012	2:50:38 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:50:38 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:50:38 PM	Tube furnace set to 0
3/8/2012	2:51:08 PM	H2 valve closed
3/8/2012	2:51:08 PM	BCl3 valve closed
3/8/2012	2:51:08 PM	PH3 valve closed
3/8/2012	2:51:08 PM	SiCl4 pre valve closed
3/8/2012	2:51:08 PM	SiCl4 post valve closed
3/8/2012	2:51:08 PM	Bypass valve closed
3/8/2012	2:51:08 PM	Bubbler valve closed
3/8/2012	2:51:08 PM	Helium valve opened
3/8/2012	2:51:08 PM	Main Vac valve opened
3/8/2012	2:51:08 PM	Helium MFC set to  20.000000
3/8/2012	2:51:08 PM	H2 MFC set to  0.000000
3/8/2012	2:51:08 PM	BCl3 MFC set to  0.000000
3/8/2012	2:51:08 PM	PH3 MFC set to  0.000000
3/8/2012	2:51:08 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:51:08 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:51:08 PM	Tube furnace set to 0
3/8/2012	2:51:38 PM	Helium valve closed
3/8/2012	2:51:38 PM	H2 valve closed
3/8/2012	2:51:38 PM	BCl3 valve closed
3/8/2012	2:51:38 PM	PH3 valve closed
3/8/2012	2:51:38 PM	SiCl4 pre valve closed
3/8/2012	2:51:38 PM	SiCl4 post valve closed
3/8/2012	2:51:38 PM	Bypass valve closed
3/8/2012	2:51:38 PM	Bubbler valve closed
3/8/2012	2:51:38 PM	Main Vac valve opened
3/8/2012	2:51:38 PM	Helium MFC set to  0.000000
3/8/2012	2:51:38 PM	H2 MFC set to  0.000000
3/8/2012	2:51:38 PM	BCl3 MFC set to  0.000000
3/8/2012	2:51:38 PM	PH3 MFC set to  0.000000
3/8/2012	2:51:38 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:51:38 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:51:38 PM	Tube furnace set to 0
3/8/2012	2:52:08 PM	H2 valve closed
3/8/2012	2:52:08 PM	BCl3 valve closed
3/8/2012	2:52:08 PM	PH3 valve closed
3/8/2012	2:52:08 PM	SiCl4 pre valve closed
3/8/2012	2:52:08 PM	SiCl4 post valve closed
3/8/2012	2:52:08 PM	Bypass valve closed
3/8/2012	2:52:08 PM	Bubbler valve closed
3/8/2012	2:52:08 PM	Helium valve opened
3/8/2012	2:52:08 PM	Main Vac valve opened
3/8/2012	2:52:08 PM	Helium MFC set to  20.000000
3/8/2012	2:52:08 PM	H2 MFC set to  0.000000
3/8/2012	2:52:08 PM	BCl3 MFC set to  0.000000
3/8/2012	2:52:08 PM	PH3 MFC set to  0.000000
3/8/2012	2:52:08 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:52:08 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:52:08 PM	Tube furnace set to 0
3/8/2012	2:52:38 PM	Helium valve closed
3/8/2012	2:52:38 PM	H2 valve closed
3/8/2012	2:52:38 PM	BCl3 valve closed
3/8/2012	2:52:38 PM	PH3 valve closed
3/8/2012	2:52:38 PM	SiCl4 pre valve closed
3/8/2012	2:52:38 PM	SiCl4 post valve closed
3/8/2012	2:52:38 PM	Bypass valve closed
3/8/2012	2:52:38 PM	Bubbler valve closed
3/8/2012	2:52:38 PM	Main Vac valve opened
3/8/2012	2:52:38 PM	Helium MFC set to  0.000000
3/8/2012	2:52:38 PM	H2 MFC set to  0.000000
3/8/2012	2:52:38 PM	BCl3 MFC set to  0.000000
3/8/2012	2:52:38 PM	PH3 MFC set to  0.000000
3/8/2012	2:52:38 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:52:38 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:52:39 PM	Tube furnace set to 0
3/8/2012	2:53:09 PM	H2 valve closed
3/8/2012	2:53:09 PM	BCl3 valve closed
3/8/2012	2:53:09 PM	PH3 valve closed
3/8/2012	2:53:09 PM	SiCl4 pre valve closed
3/8/2012	2:53:09 PM	SiCl4 post valve closed
3/8/2012	2:53:09 PM	Bypass valve closed
3/8/2012	2:53:09 PM	Bubbler valve closed
3/8/2012	2:53:09 PM	Helium valve opened
3/8/2012	2:53:09 PM	Main Vac valve opened
3/8/2012	2:53:09 PM	Helium MFC set to  20.000000
3/8/2012	2:53:09 PM	H2 MFC set to  0.000000
3/8/2012	2:53:09 PM	BCl3 MFC set to  0.000000
3/8/2012	2:53:09 PM	PH3 MFC set to  0.000000
3/8/2012	2:53:09 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:53:09 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:53:09 PM	Tube furnace set to 0
3/8/2012	2:53:39 PM	Helium valve closed
3/8/2012	2:53:39 PM	H2 valve closed
3/8/2012	2:53:39 PM	BCl3 valve closed
3/8/2012	2:53:39 PM	PH3 valve closed
3/8/2012	2:53:39 PM	SiCl4 pre valve closed
3/8/2012	2:53:39 PM	SiCl4 post valve closed
3/8/2012	2:53:39 PM	Bypass valve closed
3/8/2012	2:53:39 PM	Bubbler valve closed
3/8/2012	2:53:39 PM	Main Vac valve opened
3/8/2012	2:53:39 PM	Helium MFC set to  0.000000
3/8/2012	2:53:39 PM	H2 MFC set to  0.000000
3/8/2012	2:53:39 PM	BCl3 MFC set to  0.000000
3/8/2012	2:53:39 PM	PH3 MFC set to  0.000000
3/8/2012	2:53:39 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:53:39 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:53:39 PM	Tube furnace set to 0
3/8/2012	2:54:09 PM	H2 valve closed
3/8/2012	2:54:09 PM	BCl3 valve closed
3/8/2012	2:54:09 PM	PH3 valve closed
3/8/2012	2:54:09 PM	SiCl4 pre valve closed
3/8/2012	2:54:09 PM	SiCl4 post valve closed
3/8/2012	2:54:09 PM	Bypass valve closed
3/8/2012	2:54:09 PM	Bubbler valve closed
3/8/2012	2:54:09 PM	Helium valve opened
3/8/2012	2:54:09 PM	Main Vac valve opened
3/8/2012	2:54:09 PM	Helium MFC set to  20.000000
3/8/2012	2:54:09 PM	H2 MFC set to  0.000000
3/8/2012	2:54:09 PM	BCl3 MFC set to  0.000000
3/8/2012	2:54:09 PM	PH3 MFC set to  0.000000
3/8/2012	2:54:09 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:54:09 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:54:09 PM	Tube furnace set to 0
3/8/2012	2:54:39 PM	Helium valve closed
3/8/2012	2:54:39 PM	H2 valve closed
3/8/2012	2:54:39 PM	BCl3 valve closed
3/8/2012	2:54:39 PM	PH3 valve closed
3/8/2012	2:54:39 PM	SiCl4 pre valve closed
3/8/2012	2:54:39 PM	SiCl4 post valve closed
3/8/2012	2:54:39 PM	Bypass valve closed
3/8/2012	2:54:39 PM	Bubbler valve closed
3/8/2012	2:54:39 PM	Main Vac valve opened
3/8/2012	2:54:39 PM	Helium MFC set to  0.000000
3/8/2012	2:54:39 PM	H2 MFC set to  0.000000
3/8/2012	2:54:39 PM	BCl3 MFC set to  0.000000
3/8/2012	2:54:39 PM	PH3 MFC set to  0.000000
3/8/2012	2:54:39 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:54:39 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:54:39 PM	Tube furnace set to 0
3/8/2012	2:55:09 PM	H2 valve closed
3/8/2012	2:55:09 PM	BCl3 valve closed
3/8/2012	2:55:09 PM	PH3 valve closed
3/8/2012	2:55:09 PM	SiCl4 pre valve closed
3/8/2012	2:55:09 PM	SiCl4 post valve closed
3/8/2012	2:55:09 PM	Bypass valve closed
3/8/2012	2:55:09 PM	Bubbler valve closed
3/8/2012	2:55:09 PM	Helium valve opened
3/8/2012	2:55:09 PM	Main Vac valve opened
3/8/2012	2:55:09 PM	Helium MFC set to  20.000000
3/8/2012	2:55:09 PM	H2 MFC set to  0.000000
3/8/2012	2:55:09 PM	BCl3 MFC set to  0.000000
3/8/2012	2:55:09 PM	PH3 MFC set to  0.000000
3/8/2012	2:55:09 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:55:09 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:55:10 PM	Tube furnace set to 0
3/8/2012	2:55:40 PM	Helium valve closed
3/8/2012	2:55:40 PM	H2 valve closed
3/8/2012	2:55:40 PM	BCl3 valve closed
3/8/2012	2:55:40 PM	PH3 valve closed
3/8/2012	2:55:40 PM	SiCl4 pre valve closed
3/8/2012	2:55:40 PM	SiCl4 post valve closed
3/8/2012	2:55:40 PM	Bypass valve closed
3/8/2012	2:55:40 PM	Bubbler valve closed
3/8/2012	2:55:40 PM	Main Vac valve opened
3/8/2012	2:55:40 PM	Helium MFC set to  0.000000
3/8/2012	2:55:40 PM	H2 MFC set to  0.000000
3/8/2012	2:55:40 PM	BCl3 MFC set to  0.000000
3/8/2012	2:55:40 PM	PH3 MFC set to  0.000000
3/8/2012	2:55:40 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:55:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:55:40 PM	Tube furnace set to 0
3/8/2012	2:56:10 PM	H2 valve closed
3/8/2012	2:56:10 PM	BCl3 valve closed
3/8/2012	2:56:10 PM	PH3 valve closed
3/8/2012	2:56:10 PM	SiCl4 pre valve closed
3/8/2012	2:56:10 PM	SiCl4 post valve closed
3/8/2012	2:56:10 PM	Bypass valve closed
3/8/2012	2:56:10 PM	Bubbler valve closed
3/8/2012	2:56:10 PM	Helium valve opened
3/8/2012	2:56:10 PM	Main Vac valve opened
3/8/2012	2:56:10 PM	Helium MFC set to  20.000000
3/8/2012	2:56:10 PM	H2 MFC set to  0.000000
3/8/2012	2:56:10 PM	BCl3 MFC set to  0.000000
3/8/2012	2:56:10 PM	PH3 MFC set to  0.000000
3/8/2012	2:56:10 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:56:10 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:56:10 PM	Tube furnace set to 0
3/8/2012	2:56:40 PM	Helium valve closed
3/8/2012	2:56:40 PM	H2 valve closed
3/8/2012	2:56:40 PM	BCl3 valve closed
3/8/2012	2:56:40 PM	PH3 valve closed
3/8/2012	2:56:40 PM	SiCl4 pre valve closed
3/8/2012	2:56:40 PM	SiCl4 post valve closed
3/8/2012	2:56:40 PM	Bypass valve closed
3/8/2012	2:56:40 PM	Bubbler valve closed
3/8/2012	2:56:40 PM	Main Vac valve opened
3/8/2012	2:56:40 PM	Helium MFC set to  0.000000
3/8/2012	2:56:40 PM	H2 MFC set to  0.000000
3/8/2012	2:56:40 PM	BCl3 MFC set to  0.000000
3/8/2012	2:56:40 PM	PH3 MFC set to  0.000000
3/8/2012	2:56:40 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:56:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:56:40 PM	Tube furnace set to 0
3/8/2012	2:57:10 PM	H2 valve closed
3/8/2012	2:57:10 PM	BCl3 valve closed
3/8/2012	2:57:10 PM	PH3 valve closed
3/8/2012	2:57:10 PM	SiCl4 pre valve closed
3/8/2012	2:57:10 PM	SiCl4 post valve closed
3/8/2012	2:57:10 PM	Bypass valve closed
3/8/2012	2:57:10 PM	Bubbler valve closed
3/8/2012	2:57:10 PM	Helium valve opened
3/8/2012	2:57:10 PM	Main Vac valve opened
3/8/2012	2:57:10 PM	Helium MFC set to  20.000000
3/8/2012	2:57:10 PM	H2 MFC set to  0.000000
3/8/2012	2:57:10 PM	BCl3 MFC set to  0.000000
3/8/2012	2:57:10 PM	PH3 MFC set to  0.000000
3/8/2012	2:57:10 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:57:10 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:57:10 PM	Tube furnace set to 0
3/8/2012	2:57:40 PM	Helium valve closed
3/8/2012	2:57:40 PM	H2 valve closed
3/8/2012	2:57:40 PM	BCl3 valve closed
3/8/2012	2:57:40 PM	PH3 valve closed
3/8/2012	2:57:40 PM	SiCl4 pre valve closed
3/8/2012	2:57:40 PM	SiCl4 post valve closed
3/8/2012	2:57:40 PM	Bypass valve closed
3/8/2012	2:57:40 PM	Bubbler valve closed
3/8/2012	2:57:40 PM	Main Vac valve opened
3/8/2012	2:57:40 PM	Helium MFC set to  0.000000
3/8/2012	2:57:40 PM	H2 MFC set to  0.000000
3/8/2012	2:57:40 PM	BCl3 MFC set to  0.000000
3/8/2012	2:57:40 PM	PH3 MFC set to  0.000000
3/8/2012	2:57:40 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:57:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:57:41 PM	Tube furnace set to 0
3/8/2012	2:58:11 PM	H2 valve closed
3/8/2012	2:58:11 PM	BCl3 valve closed
3/8/2012	2:58:11 PM	PH3 valve closed
3/8/2012	2:58:11 PM	SiCl4 pre valve closed
3/8/2012	2:58:11 PM	SiCl4 post valve closed
3/8/2012	2:58:11 PM	Bypass valve closed
3/8/2012	2:58:11 PM	Bubbler valve closed
3/8/2012	2:58:11 PM	Helium valve opened
3/8/2012	2:58:11 PM	Main Vac valve opened
3/8/2012	2:58:11 PM	Helium MFC set to  20.000000
3/8/2012	2:58:11 PM	H2 MFC set to  0.000000
3/8/2012	2:58:11 PM	BCl3 MFC set to  0.000000
3/8/2012	2:58:11 PM	PH3 MFC set to  0.000000
3/8/2012	2:58:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:58:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:58:11 PM	Tube furnace set to 0
3/8/2012	2:58:41 PM	Helium valve closed
3/8/2012	2:58:41 PM	H2 valve closed
3/8/2012	2:58:41 PM	BCl3 valve closed
3/8/2012	2:58:41 PM	PH3 valve closed
3/8/2012	2:58:41 PM	SiCl4 pre valve closed
3/8/2012	2:58:41 PM	SiCl4 post valve closed
3/8/2012	2:58:41 PM	Bypass valve closed
3/8/2012	2:58:41 PM	Bubbler valve closed
3/8/2012	2:58:41 PM	Main Vac valve opened
3/8/2012	2:58:41 PM	Helium MFC set to  0.000000
3/8/2012	2:58:41 PM	H2 MFC set to  0.000000
3/8/2012	2:58:41 PM	BCl3 MFC set to  0.000000
3/8/2012	2:58:41 PM	PH3 MFC set to  0.000000
3/8/2012	2:58:41 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:58:41 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:58:41 PM	Tube furnace set to 0
3/8/2012	2:59:11 PM	H2 valve closed
3/8/2012	2:59:11 PM	BCl3 valve closed
3/8/2012	2:59:11 PM	PH3 valve closed
3/8/2012	2:59:11 PM	SiCl4 pre valve closed
3/8/2012	2:59:11 PM	SiCl4 post valve closed
3/8/2012	2:59:11 PM	Bypass valve closed
3/8/2012	2:59:11 PM	Bubbler valve closed
3/8/2012	2:59:11 PM	Helium valve opened
3/8/2012	2:59:11 PM	Main Vac valve opened
3/8/2012	2:59:11 PM	Helium MFC set to  20.000000
3/8/2012	2:59:11 PM	H2 MFC set to  0.000000
3/8/2012	2:59:11 PM	BCl3 MFC set to  0.000000
3/8/2012	2:59:11 PM	PH3 MFC set to  0.000000
3/8/2012	2:59:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:59:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:59:11 PM	Tube furnace set to 0
3/8/2012	2:59:41 PM	Helium valve closed
3/8/2012	2:59:41 PM	H2 valve closed
3/8/2012	2:59:41 PM	BCl3 valve closed
3/8/2012	2:59:41 PM	PH3 valve closed
3/8/2012	2:59:41 PM	SiCl4 pre valve closed
3/8/2012	2:59:41 PM	SiCl4 post valve closed
3/8/2012	2:59:41 PM	Bypass valve closed
3/8/2012	2:59:41 PM	Bubbler valve closed
3/8/2012	2:59:41 PM	Main Vac valve opened
3/8/2012	2:59:41 PM	Helium MFC set to  0.000000
3/8/2012	2:59:41 PM	H2 MFC set to  0.000000
3/8/2012	2:59:41 PM	BCl3 MFC set to  0.000000
3/8/2012	2:59:41 PM	PH3 MFC set to  0.000000
3/8/2012	2:59:41 PM	SiCl4 MFC set to  0.000000
3/8/2012	2:59:41 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	2:59:41 PM	Tube furnace set to 0
3/8/2012	2:59:42 PM	Run finished at 2:59 PM
3/8/2012	2:59:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	3:12:41 PM	Main Vac valve closed
3/8/2012	3:12:55 PM	Main Vac valve opened
3/8/2012	3:15:11 PM	Recipe started at 3:15 PM
3/8/2012	3:15:11 PM	Helium valve closed
3/8/2012	3:15:11 PM	H2 valve closed
3/8/2012	3:15:11 PM	BCl3 valve closed
3/8/2012	3:15:11 PM	PH3 valve closed
3/8/2012	3:15:11 PM	SiCl4 pre valve closed
3/8/2012	3:15:11 PM	SiCl4 post valve closed
3/8/2012	3:15:11 PM	Main Vac valve closed
3/8/2012	3:15:11 PM	Bypass valve closed
3/8/2012	3:15:11 PM	Bubbler valve closed
3/8/2012	3:15:11 PM	Helium MFC set to  0.000000
3/8/2012	3:15:11 PM	H2 MFC set to  0.000000
3/8/2012	3:15:11 PM	BCl3 MFC set to  0.000000
3/8/2012	3:15:11 PM	PH3 MFC set to  0.000000
3/8/2012	3:15:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	3:15:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:15:11 PM	Tube furnace set to 0
3/8/2012	3:15:14 PM	Helium valve closed
3/8/2012	3:15:14 PM	BCl3 valve closed
3/8/2012	3:15:14 PM	PH3 valve closed
3/8/2012	3:15:14 PM	SiCl4 pre valve closed
3/8/2012	3:15:14 PM	SiCl4 post valve closed
3/8/2012	3:15:14 PM	Main Vac valve closed
3/8/2012	3:15:14 PM	Bypass valve closed
3/8/2012	3:15:14 PM	Bubbler valve closed
3/8/2012	3:15:14 PM	H2 valve opened
3/8/2012	3:15:14 PM	Helium MFC set to  0.000000
3/8/2012	3:15:14 PM	H2 MFC set to  500.000000
3/8/2012	3:15:14 PM	BCl3 MFC set to  0.000000
3/8/2012	3:15:14 PM	PH3 MFC set to  0.000000
3/8/2012	3:15:14 PM	SiCl4 MFC set to  0.000000
3/8/2012	3:15:14 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:15:14 PM	Tube furnace set to 0
3/8/2012	3:16:20 PM	Helium valve closed
3/8/2012	3:16:20 PM	BCl3 valve closed
3/8/2012	3:16:20 PM	PH3 valve closed
3/8/2012	3:16:20 PM	SiCl4 pre valve closed
3/8/2012	3:16:20 PM	SiCl4 post valve closed
3/8/2012	3:16:20 PM	Main Vac valve closed
3/8/2012	3:16:20 PM	Bypass valve closed
3/8/2012	3:16:20 PM	H2 valve opened
3/8/2012	3:16:20 PM	Bubbler valve opened
3/8/2012	3:16:20 PM	Helium MFC set to  0.000000
3/8/2012	3:16:20 PM	H2 MFC set to  500.000000
3/8/2012	3:16:20 PM	BCl3 MFC set to  0.000000
3/8/2012	3:16:20 PM	PH3 MFC set to  0.000000
3/8/2012	3:16:20 PM	SiCl4 MFC set to  0.000000
3/8/2012	3:16:20 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:16:20 PM	Tube furnace set to 0
3/8/2012	3:16:22 PM	Helium valve closed
3/8/2012	3:16:22 PM	BCl3 valve closed
3/8/2012	3:16:22 PM	PH3 valve closed
3/8/2012	3:16:22 PM	SiCl4 pre valve closed
3/8/2012	3:16:22 PM	SiCl4 post valve closed
3/8/2012	3:16:22 PM	Main Vac valve closed
3/8/2012	3:16:22 PM	Bypass valve closed
3/8/2012	3:16:22 PM	H2 valve opened
3/8/2012	3:16:22 PM	Bubbler valve opened
3/8/2012	3:16:22 PM	Helium MFC set to  0.000000
3/8/2012	3:16:22 PM	H2 MFC set to  500.000000
3/8/2012	3:16:22 PM	BCl3 MFC set to  0.000000
3/8/2012	3:16:22 PM	PH3 MFC set to  0.000000
3/8/2012	3:16:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	3:16:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:16:22 PM	Tube furnace set to 950
3/8/2012	3:36:22 PM	Helium valve closed
3/8/2012	3:36:22 PM	PH3 valve closed
3/8/2012	3:36:22 PM	Main Vac valve closed
3/8/2012	3:36:22 PM	Bypass valve closed
3/8/2012	3:36:22 PM	H2 valve opened
3/8/2012	3:36:22 PM	BCl3 valve opened
3/8/2012	3:36:22 PM	SiCl4 pre valve opened
3/8/2012	3:36:22 PM	SiCl4 post valve opened
3/8/2012	3:36:22 PM	Bubbler valve opened
3/8/2012	3:36:22 PM	Helium MFC set to  0.000000
3/8/2012	3:36:22 PM	H2 MFC set to  500.000000
3/8/2012	3:36:22 PM	BCl3 MFC set to  1.000000
3/8/2012	3:36:22 PM	PH3 MFC set to  0.000000
3/8/2012	3:36:22 PM	SiCl4 MFC set to  25.000000
3/8/2012	3:36:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:36:22 PM	Tube furnace set to 950
3/8/2012	3:58:22 PM	Helium valve closed
3/8/2012	3:58:22 PM	BCl3 valve closed
3/8/2012	3:58:22 PM	PH3 valve closed
3/8/2012	3:58:22 PM	SiCl4 pre valve closed
3/8/2012	3:58:22 PM	SiCl4 post valve closed
3/8/2012	3:58:22 PM	Main Vac valve closed
3/8/2012	3:58:22 PM	Bypass valve closed
3/8/2012	3:58:22 PM	H2 valve opened
3/8/2012	3:58:22 PM	Bubbler valve opened
3/8/2012	3:58:22 PM	Helium MFC set to  0.000000
3/8/2012	3:58:22 PM	H2 MFC set to  500.000000
3/8/2012	3:58:22 PM	BCl3 MFC set to  0.000000
3/8/2012	3:58:22 PM	PH3 MFC set to  0.000000
3/8/2012	3:58:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	3:58:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	3:58:22 PM	Tube furnace set to 750
3/8/2012	4:03:22 PM	H2 valve closed
3/8/2012	4:03:22 PM	BCl3 valve closed
3/8/2012	4:03:22 PM	PH3 valve closed
3/8/2012	4:03:22 PM	SiCl4 pre valve closed
3/8/2012	4:03:22 PM	SiCl4 post valve closed
3/8/2012	4:03:22 PM	Main Vac valve closed
3/8/2012	4:03:22 PM	Bypass valve closed
3/8/2012	4:03:22 PM	Helium valve opened
3/8/2012	4:03:22 PM	Bubbler valve opened
3/8/2012	4:03:22 PM	Helium MFC set to  500.000000
3/8/2012	4:03:22 PM	H2 MFC set to  0.000000
3/8/2012	4:03:22 PM	BCl3 MFC set to  0.000000
3/8/2012	4:03:22 PM	PH3 MFC set to  0.000000
3/8/2012	4:03:22 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:03:22 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:03:22 PM	Tube furnace set to 0
3/8/2012	4:17:30 PM	Helium valve closed
3/8/2012	4:17:30 PM	H2 valve closed
3/8/2012	4:17:30 PM	BCl3 valve closed
3/8/2012	4:17:30 PM	PH3 valve closed
3/8/2012	4:17:30 PM	SiCl4 pre valve closed
3/8/2012	4:17:30 PM	SiCl4 post valve closed
3/8/2012	4:17:30 PM	Main Vac valve closed
3/8/2012	4:17:30 PM	Bypass valve closed
3/8/2012	4:17:30 PM	Bubbler valve closed
3/8/2012	4:17:30 PM	Helium MFC set to  0.000000
3/8/2012	4:17:30 PM	H2 MFC set to  0.000000
3/8/2012	4:17:30 PM	BCl3 MFC set to  0.000000
3/8/2012	4:17:30 PM	PH3 MFC set to  0.000000
3/8/2012	4:17:30 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:17:30 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:17:31 PM	Tube furnace set to 0
3/8/2012	4:17:32 PM	Run finished at 4:17 PM
3/8/2012	4:17:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	4:17:53 PM	Recipe started at 4:17 PM
3/8/2012	4:17:53 PM	Helium valve closed
3/8/2012	4:17:53 PM	H2 valve closed
3/8/2012	4:17:53 PM	BCl3 valve closed
3/8/2012	4:17:53 PM	PH3 valve closed
3/8/2012	4:17:53 PM	SiCl4 pre valve closed
3/8/2012	4:17:53 PM	SiCl4 post valve closed
3/8/2012	4:17:53 PM	Main Vac valve closed
3/8/2012	4:17:53 PM	Bypass valve closed
3/8/2012	4:17:53 PM	Bubbler valve closed
3/8/2012	4:17:53 PM	Helium MFC set to  0.000000
3/8/2012	4:17:53 PM	H2 MFC set to  0.000000
3/8/2012	4:17:53 PM	BCl3 MFC set to  0.000000
3/8/2012	4:17:53 PM	PH3 MFC set to  0.000000
3/8/2012	4:17:53 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:17:53 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:17:53 PM	Tube furnace set to 0
3/8/2012	4:17:56 PM	H2 valve closed
3/8/2012	4:17:56 PM	BCl3 valve closed
3/8/2012	4:17:56 PM	PH3 valve closed
3/8/2012	4:17:56 PM	SiCl4 pre valve closed
3/8/2012	4:17:56 PM	SiCl4 post valve closed
3/8/2012	4:17:56 PM	Main Vac valve closed
3/8/2012	4:17:56 PM	Bypass valve closed
3/8/2012	4:17:56 PM	Bubbler valve closed
3/8/2012	4:17:56 PM	Helium valve opened
3/8/2012	4:17:56 PM	Helium MFC set to  500.000000
3/8/2012	4:17:56 PM	H2 MFC set to  0.000000
3/8/2012	4:17:56 PM	BCl3 MFC set to  0.000000
3/8/2012	4:17:56 PM	PH3 MFC set to  0.000000
3/8/2012	4:17:56 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:17:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:17:56 PM	Tube furnace set to 0
3/8/2012	4:17:57 PM	Helium valve closed
3/8/2012	4:17:57 PM	H2 valve closed
3/8/2012	4:17:57 PM	BCl3 valve closed
3/8/2012	4:17:57 PM	PH3 valve closed
3/8/2012	4:17:57 PM	SiCl4 pre valve closed
3/8/2012	4:17:57 PM	SiCl4 post valve closed
3/8/2012	4:17:57 PM	Main Vac valve closed
3/8/2012	4:17:57 PM	Bypass valve closed
3/8/2012	4:17:57 PM	Bubbler valve closed
3/8/2012	4:17:57 PM	Helium MFC set to  0.000000
3/8/2012	4:17:57 PM	H2 MFC set to  0.000000
3/8/2012	4:17:57 PM	BCl3 MFC set to  0.000000
3/8/2012	4:17:57 PM	PH3 MFC set to  0.000000
3/8/2012	4:17:57 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:17:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:17:57 PM	Tube furnace set to 0
3/8/2012	4:17:58 PM	Run finished at 4:17 PM
3/8/2012	4:17:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	4:22:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	4:22:32 PM	Recipe started at 4:22 PM
3/8/2012	4:22:32 PM	Helium valve closed
3/8/2012	4:22:32 PM	H2 valve closed
3/8/2012	4:22:32 PM	BCl3 valve closed
3/8/2012	4:22:32 PM	PH3 valve closed
3/8/2012	4:22:32 PM	SiCl4 pre valve closed
3/8/2012	4:22:32 PM	SiCl4 post valve closed
3/8/2012	4:22:32 PM	Main Vac valve closed
3/8/2012	4:22:32 PM	Bypass valve closed
3/8/2012	4:22:32 PM	Bubbler valve closed
3/8/2012	4:22:32 PM	Helium MFC set to  0.000000
3/8/2012	4:22:32 PM	H2 MFC set to  0.000000
3/8/2012	4:22:32 PM	BCl3 MFC set to  0.000000
3/8/2012	4:22:32 PM	PH3 MFC set to  0.000000
3/8/2012	4:22:32 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:22:32 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:22:32 PM	Tube furnace set to 0
3/8/2012	4:22:33 PM	Run aborted at 4:22 PM
3/8/2012	4:22:33 PM	Helium valve closed
3/8/2012	4:22:33 PM	H2 valve closed
3/8/2012	4:22:33 PM	BCl3 valve closed
3/8/2012	4:22:33 PM	PH3 valve closed
3/8/2012	4:22:33 PM	SiCl4 pre valve closed
3/8/2012	4:22:33 PM	SiCl4 post valve closed
3/8/2012	4:22:33 PM	Bypass valve closed
3/8/2012	4:22:33 PM	Main Vac valve closed
3/8/2012	4:22:33 PM	Bubbler valve closed
3/8/2012	4:22:33 PM	Helium MFC set to  0.000000
3/8/2012	4:22:33 PM	H2 MFC set to  0.000000
3/8/2012	4:22:33 PM	BCl3 MFC set to  0.000000
3/8/2012	4:22:33 PM	PH3 MFC set to  0.000000
3/8/2012	4:22:33 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:22:33 PM	Tube furnace set to 0
3/8/2012	4:22:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	4:22:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	4:22:36 PM	Recipe started at 4:22 PM
3/8/2012	4:22:36 PM	Helium valve closed
3/8/2012	4:22:36 PM	H2 valve closed
3/8/2012	4:22:36 PM	BCl3 valve closed
3/8/2012	4:22:36 PM	PH3 valve closed
3/8/2012	4:22:36 PM	SiCl4 pre valve closed
3/8/2012	4:22:36 PM	SiCl4 post valve closed
3/8/2012	4:22:36 PM	Main Vac valve closed
3/8/2012	4:22:36 PM	Bubbler valve closed
3/8/2012	4:22:36 PM	Bypass valve opened
3/8/2012	4:22:36 PM	Helium MFC set to  0.000000
3/8/2012	4:22:36 PM	H2 MFC set to  0.000000
3/8/2012	4:22:36 PM	BCl3 MFC set to  0.000000
3/8/2012	4:22:36 PM	PH3 MFC set to  0.000000
3/8/2012	4:22:36 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:22:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:22:36 PM	Tube furnace set to 0
3/8/2012	4:23:36 PM	Helium valve closed
3/8/2012	4:23:36 PM	H2 valve closed
3/8/2012	4:23:36 PM	BCl3 valve closed
3/8/2012	4:23:36 PM	PH3 valve closed
3/8/2012	4:23:36 PM	SiCl4 pre valve closed
3/8/2012	4:23:36 PM	SiCl4 post valve closed
3/8/2012	4:23:36 PM	Main Vac valve closed
3/8/2012	4:23:36 PM	Bubbler valve closed
3/8/2012	4:23:36 PM	Bypass valve opened
3/8/2012	4:23:36 PM	Helium MFC set to  0.000000
3/8/2012	4:23:36 PM	H2 MFC set to  0.000000
3/8/2012	4:23:36 PM	BCl3 MFC set to  0.000000
3/8/2012	4:23:36 PM	PH3 MFC set to  0.000000
3/8/2012	4:23:36 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:23:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:23:37 PM	Tube furnace set to 0
3/8/2012	4:24:37 PM	Helium valve closed
3/8/2012	4:24:37 PM	H2 valve closed
3/8/2012	4:24:37 PM	BCl3 valve closed
3/8/2012	4:24:37 PM	PH3 valve closed
3/8/2012	4:24:37 PM	SiCl4 pre valve closed
3/8/2012	4:24:37 PM	SiCl4 post valve closed
3/8/2012	4:24:37 PM	Bypass valve closed
3/8/2012	4:24:37 PM	Bubbler valve closed
3/8/2012	4:24:37 PM	Main Vac valve opened
3/8/2012	4:24:37 PM	Helium MFC set to  0.000000
3/8/2012	4:24:37 PM	H2 MFC set to  0.000000
3/8/2012	4:24:37 PM	BCl3 MFC set to  0.000000
3/8/2012	4:24:37 PM	PH3 MFC set to  0.000000
3/8/2012	4:24:37 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:24:37 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:24:37 PM	Tube furnace set to 0
3/8/2012	4:24:38 PM	Run finished at 4:24 PM
3/8/2012	4:24:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	4:43:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	4:43:52 PM	Recipe started at 4:43 PM
3/8/2012	4:43:52 PM	Helium valve closed
3/8/2012	4:43:52 PM	H2 valve closed
3/8/2012	4:43:52 PM	BCl3 valve closed
3/8/2012	4:43:52 PM	PH3 valve closed
3/8/2012	4:43:52 PM	SiCl4 pre valve closed
3/8/2012	4:43:52 PM	SiCl4 post valve closed
3/8/2012	4:43:52 PM	Main Vac valve closed
3/8/2012	4:43:52 PM	Bubbler valve closed
3/8/2012	4:43:52 PM	Bypass valve opened
3/8/2012	4:43:52 PM	Helium MFC set to  0.000000
3/8/2012	4:43:52 PM	H2 MFC set to  0.000000
3/8/2012	4:43:52 PM	BCl3 MFC set to  0.000000
3/8/2012	4:43:52 PM	PH3 MFC set to  0.000000
3/8/2012	4:43:52 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:43:52 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:43:52 PM	Tube furnace set to 0
3/8/2012	4:43:53 PM	Helium valve closed
3/8/2012	4:43:53 PM	H2 valve closed
3/8/2012	4:43:53 PM	BCl3 valve closed
3/8/2012	4:43:53 PM	PH3 valve closed
3/8/2012	4:43:53 PM	SiCl4 pre valve closed
3/8/2012	4:43:53 PM	SiCl4 post valve closed
3/8/2012	4:43:53 PM	Main Vac valve closed
3/8/2012	4:43:53 PM	Bubbler valve closed
3/8/2012	4:43:53 PM	Bypass valve opened
3/8/2012	4:43:53 PM	Helium MFC set to  0.000000
3/8/2012	4:43:53 PM	H2 MFC set to  0.000000
3/8/2012	4:43:53 PM	BCl3 MFC set to  0.000000
3/8/2012	4:43:53 PM	PH3 MFC set to  0.000000
3/8/2012	4:43:53 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:43:53 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:43:53 PM	Tube furnace set to 0
3/8/2012	4:44:23 PM	Helium valve closed
3/8/2012	4:44:23 PM	H2 valve closed
3/8/2012	4:44:23 PM	BCl3 valve closed
3/8/2012	4:44:23 PM	PH3 valve closed
3/8/2012	4:44:23 PM	SiCl4 pre valve closed
3/8/2012	4:44:23 PM	SiCl4 post valve closed
3/8/2012	4:44:23 PM	Bypass valve closed
3/8/2012	4:44:23 PM	Bubbler valve closed
3/8/2012	4:44:23 PM	Main Vac valve opened
3/8/2012	4:44:23 PM	Helium MFC set to  0.000000
3/8/2012	4:44:23 PM	H2 MFC set to  0.000000
3/8/2012	4:44:23 PM	BCl3 MFC set to  0.000000
3/8/2012	4:44:23 PM	PH3 MFC set to  0.000000
3/8/2012	4:44:23 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:44:23 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:44:23 PM	Tube furnace set to 0
3/8/2012	4:44:53 PM	H2 valve closed
3/8/2012	4:44:53 PM	BCl3 valve closed
3/8/2012	4:44:53 PM	PH3 valve closed
3/8/2012	4:44:53 PM	SiCl4 pre valve closed
3/8/2012	4:44:53 PM	SiCl4 post valve closed
3/8/2012	4:44:53 PM	Bypass valve closed
3/8/2012	4:44:53 PM	Bubbler valve closed
3/8/2012	4:44:53 PM	Helium valve opened
3/8/2012	4:44:53 PM	Main Vac valve opened
3/8/2012	4:44:53 PM	Helium MFC set to  20.000000
3/8/2012	4:44:53 PM	H2 MFC set to  0.000000
3/8/2012	4:44:53 PM	BCl3 MFC set to  0.000000
3/8/2012	4:44:53 PM	PH3 MFC set to  0.000000
3/8/2012	4:44:53 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:44:53 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:44:53 PM	Tube furnace set to 0
3/8/2012	4:45:23 PM	Helium valve closed
3/8/2012	4:45:23 PM	H2 valve closed
3/8/2012	4:45:23 PM	BCl3 valve closed
3/8/2012	4:45:23 PM	PH3 valve closed
3/8/2012	4:45:23 PM	SiCl4 pre valve closed
3/8/2012	4:45:23 PM	SiCl4 post valve closed
3/8/2012	4:45:23 PM	Bypass valve closed
3/8/2012	4:45:23 PM	Bubbler valve closed
3/8/2012	4:45:23 PM	Main Vac valve opened
3/8/2012	4:45:23 PM	Helium MFC set to  0.000000
3/8/2012	4:45:23 PM	H2 MFC set to  0.000000
3/8/2012	4:45:23 PM	BCl3 MFC set to  0.000000
3/8/2012	4:45:23 PM	PH3 MFC set to  0.000000
3/8/2012	4:45:23 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:45:23 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:45:23 PM	Tube furnace set to 0
3/8/2012	4:45:53 PM	H2 valve closed
3/8/2012	4:45:53 PM	BCl3 valve closed
3/8/2012	4:45:53 PM	PH3 valve closed
3/8/2012	4:45:53 PM	SiCl4 pre valve closed
3/8/2012	4:45:53 PM	SiCl4 post valve closed
3/8/2012	4:45:53 PM	Bypass valve closed
3/8/2012	4:45:53 PM	Bubbler valve closed
3/8/2012	4:45:53 PM	Helium valve opened
3/8/2012	4:45:53 PM	Main Vac valve opened
3/8/2012	4:45:53 PM	Helium MFC set to  20.000000
3/8/2012	4:45:53 PM	H2 MFC set to  0.000000
3/8/2012	4:45:53 PM	BCl3 MFC set to  0.000000
3/8/2012	4:45:53 PM	PH3 MFC set to  0.000000
3/8/2012	4:45:54 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:45:54 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:45:54 PM	Tube furnace set to 0
3/8/2012	4:46:24 PM	Helium valve closed
3/8/2012	4:46:24 PM	H2 valve closed
3/8/2012	4:46:24 PM	BCl3 valve closed
3/8/2012	4:46:24 PM	PH3 valve closed
3/8/2012	4:46:24 PM	SiCl4 pre valve closed
3/8/2012	4:46:24 PM	SiCl4 post valve closed
3/8/2012	4:46:24 PM	Bypass valve closed
3/8/2012	4:46:24 PM	Bubbler valve closed
3/8/2012	4:46:24 PM	Main Vac valve opened
3/8/2012	4:46:24 PM	Helium MFC set to  0.000000
3/8/2012	4:46:24 PM	H2 MFC set to  0.000000
3/8/2012	4:46:24 PM	BCl3 MFC set to  0.000000
3/8/2012	4:46:24 PM	PH3 MFC set to  0.000000
3/8/2012	4:46:24 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:46:24 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:46:24 PM	Tube furnace set to 0
3/8/2012	4:46:54 PM	H2 valve closed
3/8/2012	4:46:54 PM	BCl3 valve closed
3/8/2012	4:46:54 PM	PH3 valve closed
3/8/2012	4:46:54 PM	SiCl4 pre valve closed
3/8/2012	4:46:54 PM	SiCl4 post valve closed
3/8/2012	4:46:54 PM	Bypass valve closed
3/8/2012	4:46:54 PM	Bubbler valve closed
3/8/2012	4:46:54 PM	Helium valve opened
3/8/2012	4:46:54 PM	Main Vac valve opened
3/8/2012	4:46:54 PM	Helium MFC set to  20.000000
3/8/2012	4:46:54 PM	H2 MFC set to  0.000000
3/8/2012	4:46:54 PM	BCl3 MFC set to  0.000000
3/8/2012	4:46:54 PM	PH3 MFC set to  0.000000
3/8/2012	4:46:54 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:46:54 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:46:54 PM	Tube furnace set to 0
3/8/2012	4:47:24 PM	Helium valve closed
3/8/2012	4:47:24 PM	H2 valve closed
3/8/2012	4:47:24 PM	BCl3 valve closed
3/8/2012	4:47:24 PM	PH3 valve closed
3/8/2012	4:47:24 PM	SiCl4 pre valve closed
3/8/2012	4:47:24 PM	SiCl4 post valve closed
3/8/2012	4:47:24 PM	Bypass valve closed
3/8/2012	4:47:24 PM	Bubbler valve closed
3/8/2012	4:47:24 PM	Main Vac valve opened
3/8/2012	4:47:24 PM	Helium MFC set to  0.000000
3/8/2012	4:47:24 PM	H2 MFC set to  0.000000
3/8/2012	4:47:24 PM	BCl3 MFC set to  0.000000
3/8/2012	4:47:24 PM	PH3 MFC set to  0.000000
3/8/2012	4:47:24 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:47:24 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:47:24 PM	Tube furnace set to 0
3/8/2012	4:47:54 PM	H2 valve closed
3/8/2012	4:47:54 PM	BCl3 valve closed
3/8/2012	4:47:54 PM	PH3 valve closed
3/8/2012	4:47:54 PM	SiCl4 pre valve closed
3/8/2012	4:47:54 PM	SiCl4 post valve closed
3/8/2012	4:47:54 PM	Bypass valve closed
3/8/2012	4:47:54 PM	Bubbler valve closed
3/8/2012	4:47:54 PM	Helium valve opened
3/8/2012	4:47:54 PM	Main Vac valve opened
3/8/2012	4:47:54 PM	Helium MFC set to  20.000000
3/8/2012	4:47:54 PM	H2 MFC set to  0.000000
3/8/2012	4:47:54 PM	BCl3 MFC set to  0.000000
3/8/2012	4:47:54 PM	PH3 MFC set to  0.000000
3/8/2012	4:47:54 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:47:54 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:47:54 PM	Tube furnace set to 0
3/8/2012	4:48:24 PM	Helium valve closed
3/8/2012	4:48:24 PM	H2 valve closed
3/8/2012	4:48:24 PM	BCl3 valve closed
3/8/2012	4:48:24 PM	PH3 valve closed
3/8/2012	4:48:25 PM	SiCl4 pre valve closed
3/8/2012	4:48:25 PM	SiCl4 post valve closed
3/8/2012	4:48:25 PM	Bypass valve closed
3/8/2012	4:48:25 PM	Bubbler valve closed
3/8/2012	4:48:25 PM	Main Vac valve opened
3/8/2012	4:48:25 PM	Helium MFC set to  0.000000
3/8/2012	4:48:25 PM	H2 MFC set to  0.000000
3/8/2012	4:48:25 PM	BCl3 MFC set to  0.000000
3/8/2012	4:48:25 PM	PH3 MFC set to  0.000000
3/8/2012	4:48:25 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:48:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:48:25 PM	Tube furnace set to 0
3/8/2012	4:48:55 PM	H2 valve closed
3/8/2012	4:48:55 PM	BCl3 valve closed
3/8/2012	4:48:55 PM	PH3 valve closed
3/8/2012	4:48:55 PM	SiCl4 pre valve closed
3/8/2012	4:48:55 PM	SiCl4 post valve closed
3/8/2012	4:48:55 PM	Bypass valve closed
3/8/2012	4:48:55 PM	Bubbler valve closed
3/8/2012	4:48:55 PM	Helium valve opened
3/8/2012	4:48:55 PM	Main Vac valve opened
3/8/2012	4:48:55 PM	Helium MFC set to  20.000000
3/8/2012	4:48:55 PM	H2 MFC set to  0.000000
3/8/2012	4:48:55 PM	BCl3 MFC set to  0.000000
3/8/2012	4:48:55 PM	PH3 MFC set to  0.000000
3/8/2012	4:48:55 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:48:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:48:55 PM	Tube furnace set to 0
3/8/2012	4:49:25 PM	Helium valve closed
3/8/2012	4:49:25 PM	H2 valve closed
3/8/2012	4:49:25 PM	BCl3 valve closed
3/8/2012	4:49:25 PM	PH3 valve closed
3/8/2012	4:49:25 PM	SiCl4 pre valve closed
3/8/2012	4:49:25 PM	SiCl4 post valve closed
3/8/2012	4:49:25 PM	Bypass valve closed
3/8/2012	4:49:25 PM	Bubbler valve closed
3/8/2012	4:49:25 PM	Main Vac valve opened
3/8/2012	4:49:25 PM	Helium MFC set to  0.000000
3/8/2012	4:49:25 PM	H2 MFC set to  0.000000
3/8/2012	4:49:25 PM	BCl3 MFC set to  0.000000
3/8/2012	4:49:25 PM	PH3 MFC set to  0.000000
3/8/2012	4:49:25 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:49:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:49:25 PM	Tube furnace set to 0
3/8/2012	4:49:55 PM	H2 valve closed
3/8/2012	4:49:55 PM	BCl3 valve closed
3/8/2012	4:49:55 PM	PH3 valve closed
3/8/2012	4:49:55 PM	SiCl4 pre valve closed
3/8/2012	4:49:55 PM	SiCl4 post valve closed
3/8/2012	4:49:55 PM	Bypass valve closed
3/8/2012	4:49:55 PM	Bubbler valve closed
3/8/2012	4:49:55 PM	Helium valve opened
3/8/2012	4:49:55 PM	Main Vac valve opened
3/8/2012	4:49:55 PM	Helium MFC set to  20.000000
3/8/2012	4:49:55 PM	H2 MFC set to  0.000000
3/8/2012	4:49:55 PM	BCl3 MFC set to  0.000000
3/8/2012	4:49:55 PM	PH3 MFC set to  0.000000
3/8/2012	4:49:55 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:49:55 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:49:55 PM	Tube furnace set to 0
3/8/2012	4:50:25 PM	Helium valve closed
3/8/2012	4:50:25 PM	H2 valve closed
3/8/2012	4:50:25 PM	BCl3 valve closed
3/8/2012	4:50:25 PM	PH3 valve closed
3/8/2012	4:50:25 PM	SiCl4 pre valve closed
3/8/2012	4:50:25 PM	SiCl4 post valve closed
3/8/2012	4:50:25 PM	Bypass valve closed
3/8/2012	4:50:25 PM	Bubbler valve closed
3/8/2012	4:50:25 PM	Main Vac valve opened
3/8/2012	4:50:25 PM	Helium MFC set to  0.000000
3/8/2012	4:50:25 PM	H2 MFC set to  0.000000
3/8/2012	4:50:25 PM	BCl3 MFC set to  0.000000
3/8/2012	4:50:25 PM	PH3 MFC set to  0.000000
3/8/2012	4:50:25 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:50:25 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:50:26 PM	Tube furnace set to 0
3/8/2012	4:50:56 PM	H2 valve closed
3/8/2012	4:50:56 PM	BCl3 valve closed
3/8/2012	4:50:56 PM	PH3 valve closed
3/8/2012	4:50:56 PM	SiCl4 pre valve closed
3/8/2012	4:50:56 PM	SiCl4 post valve closed
3/8/2012	4:50:56 PM	Bypass valve closed
3/8/2012	4:50:56 PM	Bubbler valve closed
3/8/2012	4:50:56 PM	Helium valve opened
3/8/2012	4:50:56 PM	Main Vac valve opened
3/8/2012	4:50:56 PM	Helium MFC set to  20.000000
3/8/2012	4:50:56 PM	H2 MFC set to  0.000000
3/8/2012	4:50:56 PM	BCl3 MFC set to  0.000000
3/8/2012	4:50:56 PM	PH3 MFC set to  0.000000
3/8/2012	4:50:56 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:50:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:50:56 PM	Tube furnace set to 0
3/8/2012	4:51:26 PM	Helium valve closed
3/8/2012	4:51:26 PM	H2 valve closed
3/8/2012	4:51:26 PM	BCl3 valve closed
3/8/2012	4:51:26 PM	PH3 valve closed
3/8/2012	4:51:26 PM	SiCl4 pre valve closed
3/8/2012	4:51:26 PM	SiCl4 post valve closed
3/8/2012	4:51:26 PM	Bypass valve closed
3/8/2012	4:51:26 PM	Bubbler valve closed
3/8/2012	4:51:26 PM	Main Vac valve opened
3/8/2012	4:51:26 PM	Helium MFC set to  0.000000
3/8/2012	4:51:26 PM	H2 MFC set to  0.000000
3/8/2012	4:51:26 PM	BCl3 MFC set to  0.000000
3/8/2012	4:51:26 PM	PH3 MFC set to  0.000000
3/8/2012	4:51:26 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:51:26 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:51:26 PM	Tube furnace set to 0
3/8/2012	4:51:56 PM	H2 valve closed
3/8/2012	4:51:56 PM	BCl3 valve closed
3/8/2012	4:51:56 PM	PH3 valve closed
3/8/2012	4:51:56 PM	SiCl4 pre valve closed
3/8/2012	4:51:56 PM	SiCl4 post valve closed
3/8/2012	4:51:56 PM	Bypass valve closed
3/8/2012	4:51:56 PM	Bubbler valve closed
3/8/2012	4:51:56 PM	Helium valve opened
3/8/2012	4:51:56 PM	Main Vac valve opened
3/8/2012	4:51:56 PM	Helium MFC set to  20.000000
3/8/2012	4:51:56 PM	H2 MFC set to  0.000000
3/8/2012	4:51:56 PM	BCl3 MFC set to  0.000000
3/8/2012	4:51:56 PM	PH3 MFC set to  0.000000
3/8/2012	4:51:56 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:51:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:51:56 PM	Tube furnace set to 0
3/8/2012	4:52:26 PM	Helium valve closed
3/8/2012	4:52:26 PM	H2 valve closed
3/8/2012	4:52:26 PM	BCl3 valve closed
3/8/2012	4:52:26 PM	PH3 valve closed
3/8/2012	4:52:26 PM	SiCl4 pre valve closed
3/8/2012	4:52:26 PM	SiCl4 post valve closed
3/8/2012	4:52:26 PM	Bypass valve closed
3/8/2012	4:52:26 PM	Bubbler valve closed
3/8/2012	4:52:26 PM	Main Vac valve opened
3/8/2012	4:52:26 PM	Helium MFC set to  0.000000
3/8/2012	4:52:26 PM	H2 MFC set to  0.000000
3/8/2012	4:52:26 PM	BCl3 MFC set to  0.000000
3/8/2012	4:52:26 PM	PH3 MFC set to  0.000000
3/8/2012	4:52:26 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:52:26 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:52:26 PM	Tube furnace set to 0
3/8/2012	4:52:56 PM	H2 valve closed
3/8/2012	4:52:56 PM	BCl3 valve closed
3/8/2012	4:52:56 PM	PH3 valve closed
3/8/2012	4:52:56 PM	SiCl4 pre valve closed
3/8/2012	4:52:56 PM	SiCl4 post valve closed
3/8/2012	4:52:56 PM	Bypass valve closed
3/8/2012	4:52:56 PM	Bubbler valve closed
3/8/2012	4:52:56 PM	Helium valve opened
3/8/2012	4:52:56 PM	Main Vac valve opened
3/8/2012	4:52:56 PM	Helium MFC set to  20.000000
3/8/2012	4:52:56 PM	H2 MFC set to  0.000000
3/8/2012	4:52:56 PM	BCl3 MFC set to  0.000000
3/8/2012	4:52:56 PM	PH3 MFC set to  0.000000
3/8/2012	4:52:56 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:52:56 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:52:57 PM	Tube furnace set to 0
3/8/2012	4:53:27 PM	Helium valve closed
3/8/2012	4:53:27 PM	H2 valve closed
3/8/2012	4:53:27 PM	BCl3 valve closed
3/8/2012	4:53:27 PM	PH3 valve closed
3/8/2012	4:53:27 PM	SiCl4 pre valve closed
3/8/2012	4:53:27 PM	SiCl4 post valve closed
3/8/2012	4:53:27 PM	Bypass valve closed
3/8/2012	4:53:27 PM	Bubbler valve closed
3/8/2012	4:53:27 PM	Main Vac valve opened
3/8/2012	4:53:27 PM	Helium MFC set to  0.000000
3/8/2012	4:53:27 PM	H2 MFC set to  0.000000
3/8/2012	4:53:27 PM	BCl3 MFC set to  0.000000
3/8/2012	4:53:27 PM	PH3 MFC set to  0.000000
3/8/2012	4:53:27 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:53:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:53:27 PM	Tube furnace set to 0
3/8/2012	4:53:57 PM	H2 valve closed
3/8/2012	4:53:57 PM	BCl3 valve closed
3/8/2012	4:53:57 PM	PH3 valve closed
3/8/2012	4:53:57 PM	SiCl4 pre valve closed
3/8/2012	4:53:57 PM	SiCl4 post valve closed
3/8/2012	4:53:57 PM	Bypass valve closed
3/8/2012	4:53:57 PM	Bubbler valve closed
3/8/2012	4:53:57 PM	Helium valve opened
3/8/2012	4:53:57 PM	Main Vac valve opened
3/8/2012	4:53:57 PM	Helium MFC set to  20.000000
3/8/2012	4:53:57 PM	H2 MFC set to  0.000000
3/8/2012	4:53:57 PM	BCl3 MFC set to  0.000000
3/8/2012	4:53:57 PM	PH3 MFC set to  0.000000
3/8/2012	4:53:57 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:53:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:53:57 PM	Tube furnace set to 0
3/8/2012	4:54:27 PM	Helium valve closed
3/8/2012	4:54:27 PM	H2 valve closed
3/8/2012	4:54:27 PM	BCl3 valve closed
3/8/2012	4:54:27 PM	PH3 valve closed
3/8/2012	4:54:27 PM	SiCl4 pre valve closed
3/8/2012	4:54:27 PM	SiCl4 post valve closed
3/8/2012	4:54:27 PM	Bypass valve closed
3/8/2012	4:54:27 PM	Bubbler valve closed
3/8/2012	4:54:27 PM	Main Vac valve opened
3/8/2012	4:54:27 PM	Helium MFC set to  0.000000
3/8/2012	4:54:27 PM	H2 MFC set to  0.000000
3/8/2012	4:54:27 PM	BCl3 MFC set to  0.000000
3/8/2012	4:54:27 PM	PH3 MFC set to  0.000000
3/8/2012	4:54:27 PM	SiCl4 MFC set to  0.000000
3/8/2012	4:54:27 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	4:54:27 PM	Tube furnace set to 0
3/8/2012	4:54:28 PM	Run finished at 4:54 PM
3/8/2012	4:54:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/8/2012	5:01:43 PM	Main Vac valve closed
3/8/2012	5:01:57 PM	Main Vac valve opened
3/8/2012	5:02:33 PM	Recipe started at 5:02 PM
3/8/2012	5:02:33 PM	Helium valve closed
3/8/2012	5:02:33 PM	H2 valve closed
3/8/2012	5:02:33 PM	BCl3 valve closed
3/8/2012	5:02:33 PM	PH3 valve closed
3/8/2012	5:02:33 PM	SiCl4 pre valve closed
3/8/2012	5:02:33 PM	SiCl4 post valve closed
3/8/2012	5:02:33 PM	Main Vac valve closed
3/8/2012	5:02:33 PM	Bypass valve closed
3/8/2012	5:02:33 PM	Bubbler valve closed
3/8/2012	5:02:33 PM	Helium MFC set to  0.000000
3/8/2012	5:02:33 PM	H2 MFC set to  0.000000
3/8/2012	5:02:33 PM	BCl3 MFC set to  0.000000
3/8/2012	5:02:33 PM	PH3 MFC set to  0.000000
3/8/2012	5:02:33 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:02:33 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:02:33 PM	Tube furnace set to 0
3/8/2012	5:02:36 PM	Helium valve closed
3/8/2012	5:02:36 PM	BCl3 valve closed
3/8/2012	5:02:36 PM	PH3 valve closed
3/8/2012	5:02:36 PM	SiCl4 pre valve closed
3/8/2012	5:02:36 PM	SiCl4 post valve closed
3/8/2012	5:02:36 PM	Main Vac valve closed
3/8/2012	5:02:36 PM	Bypass valve closed
3/8/2012	5:02:36 PM	Bubbler valve closed
3/8/2012	5:02:36 PM	H2 valve opened
3/8/2012	5:02:36 PM	Helium MFC set to  0.000000
3/8/2012	5:02:36 PM	H2 MFC set to  500.000000
3/8/2012	5:02:36 PM	BCl3 MFC set to  0.000000
3/8/2012	5:02:36 PM	PH3 MFC set to  0.000000
3/8/2012	5:02:36 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:02:36 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:02:36 PM	Tube furnace set to 0
3/8/2012	5:03:40 PM	Helium valve closed
3/8/2012	5:03:40 PM	BCl3 valve closed
3/8/2012	5:03:40 PM	PH3 valve closed
3/8/2012	5:03:40 PM	SiCl4 pre valve closed
3/8/2012	5:03:40 PM	SiCl4 post valve closed
3/8/2012	5:03:40 PM	Main Vac valve closed
3/8/2012	5:03:40 PM	Bypass valve closed
3/8/2012	5:03:40 PM	H2 valve opened
3/8/2012	5:03:40 PM	Bubbler valve opened
3/8/2012	5:03:40 PM	Helium MFC set to  0.000000
3/8/2012	5:03:40 PM	H2 MFC set to  500.000000
3/8/2012	5:03:40 PM	BCl3 MFC set to  0.000000
3/8/2012	5:03:40 PM	PH3 MFC set to  0.000000
3/8/2012	5:03:40 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:03:40 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:03:40 PM	Tube furnace set to 0
3/8/2012	5:03:41 PM	Helium valve closed
3/8/2012	5:03:41 PM	BCl3 valve closed
3/8/2012	5:03:41 PM	PH3 valve closed
3/8/2012	5:03:41 PM	SiCl4 pre valve closed
3/8/2012	5:03:41 PM	SiCl4 post valve closed
3/8/2012	5:03:41 PM	Main Vac valve closed
3/8/2012	5:03:41 PM	Bypass valve closed
3/8/2012	5:03:41 PM	H2 valve opened
3/8/2012	5:03:41 PM	Bubbler valve opened
3/8/2012	5:03:41 PM	Helium MFC set to  0.000000
3/8/2012	5:03:41 PM	H2 MFC set to  500.000000
3/8/2012	5:03:41 PM	BCl3 MFC set to  0.000000
3/8/2012	5:03:41 PM	PH3 MFC set to  0.000000
3/8/2012	5:03:41 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:03:41 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:03:41 PM	Tube furnace set to 950
3/8/2012	5:23:41 PM	Helium valve closed
3/8/2012	5:23:41 PM	PH3 valve closed
3/8/2012	5:23:41 PM	Main Vac valve closed
3/8/2012	5:23:41 PM	Bypass valve closed
3/8/2012	5:23:41 PM	H2 valve opened
3/8/2012	5:23:41 PM	BCl3 valve opened
3/8/2012	5:23:41 PM	SiCl4 pre valve opened
3/8/2012	5:23:41 PM	SiCl4 post valve opened
3/8/2012	5:23:41 PM	Bubbler valve opened
3/8/2012	5:23:41 PM	Helium MFC set to  0.000000
3/8/2012	5:23:41 PM	H2 MFC set to  500.000000
3/8/2012	5:23:41 PM	BCl3 MFC set to  1.000000
3/8/2012	5:23:41 PM	PH3 MFC set to  0.000000
3/8/2012	5:23:41 PM	SiCl4 MFC set to  20.000000
3/8/2012	5:23:41 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:23:41 PM	Tube furnace set to 950
3/8/2012	5:45:42 PM	Helium valve closed
3/8/2012	5:45:42 PM	BCl3 valve closed
3/8/2012	5:45:42 PM	PH3 valve closed
3/8/2012	5:45:42 PM	SiCl4 pre valve closed
3/8/2012	5:45:42 PM	SiCl4 post valve closed
3/8/2012	5:45:42 PM	Main Vac valve closed
3/8/2012	5:45:42 PM	Bypass valve closed
3/8/2012	5:45:42 PM	H2 valve opened
3/8/2012	5:45:42 PM	Bubbler valve opened
3/8/2012	5:45:42 PM	Helium MFC set to  0.000000
3/8/2012	5:45:42 PM	H2 MFC set to  500.000000
3/8/2012	5:45:42 PM	BCl3 MFC set to  0.000000
3/8/2012	5:45:42 PM	PH3 MFC set to  0.000000
3/8/2012	5:45:42 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:45:42 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:45:42 PM	Tube furnace set to 750
3/8/2012	5:50:42 PM	H2 valve closed
3/8/2012	5:50:42 PM	BCl3 valve closed
3/8/2012	5:50:42 PM	PH3 valve closed
3/8/2012	5:50:42 PM	SiCl4 pre valve closed
3/8/2012	5:50:42 PM	SiCl4 post valve closed
3/8/2012	5:50:42 PM	Main Vac valve closed
3/8/2012	5:50:42 PM	Bypass valve closed
3/8/2012	5:50:42 PM	Helium valve opened
3/8/2012	5:50:42 PM	Bubbler valve opened
3/8/2012	5:50:42 PM	Helium MFC set to  500.000000
3/8/2012	5:50:42 PM	H2 MFC set to  0.000000
3/8/2012	5:50:42 PM	BCl3 MFC set to  0.000000
3/8/2012	5:50:42 PM	PH3 MFC set to  0.000000
3/8/2012	5:50:42 PM	SiCl4 MFC set to  0.000000
3/8/2012	5:50:42 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	5:50:42 PM	Tube furnace set to 0
3/8/2012	6:01:47 PM	Helium valve closed
3/8/2012	6:01:47 PM	H2 valve closed
3/8/2012	6:01:47 PM	BCl3 valve closed
3/8/2012	6:01:47 PM	PH3 valve closed
3/8/2012	6:01:47 PM	SiCl4 pre valve closed
3/8/2012	6:01:47 PM	SiCl4 post valve closed
3/8/2012	6:01:47 PM	Main Vac valve closed
3/8/2012	6:01:47 PM	Bypass valve closed
3/8/2012	6:01:47 PM	Bubbler valve closed
3/8/2012	6:01:47 PM	Helium MFC set to  0.000000
3/8/2012	6:01:47 PM	H2 MFC set to  0.000000
3/8/2012	6:01:47 PM	BCl3 MFC set to  0.000000
3/8/2012	6:01:47 PM	PH3 MFC set to  0.000000
3/8/2012	6:01:47 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:01:47 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:01:48 PM	Tube furnace set to 0
3/8/2012	6:01:49 PM	Run finished at 6:01 PM
3/8/2012	6:01:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	6:01:53 PM	Recipe started at 6:01 PM
3/8/2012	6:01:53 PM	Helium valve closed
3/8/2012	6:01:53 PM	H2 valve closed
3/8/2012	6:01:53 PM	BCl3 valve closed
3/8/2012	6:01:53 PM	PH3 valve closed
3/8/2012	6:01:53 PM	SiCl4 pre valve closed
3/8/2012	6:01:53 PM	SiCl4 post valve closed
3/8/2012	6:01:53 PM	Main Vac valve closed
3/8/2012	6:01:53 PM	Bypass valve closed
3/8/2012	6:01:53 PM	Bubbler valve closed
3/8/2012	6:01:53 PM	Helium MFC set to  0.000000
3/8/2012	6:01:53 PM	H2 MFC set to  0.000000
3/8/2012	6:01:53 PM	BCl3 MFC set to  0.000000
3/8/2012	6:01:53 PM	PH3 MFC set to  0.000000
3/8/2012	6:01:53 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:01:53 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:01:54 PM	Tube furnace set to 0
3/8/2012	6:01:57 PM	H2 valve closed
3/8/2012	6:01:57 PM	BCl3 valve closed
3/8/2012	6:01:57 PM	PH3 valve closed
3/8/2012	6:01:57 PM	SiCl4 pre valve closed
3/8/2012	6:01:57 PM	SiCl4 post valve closed
3/8/2012	6:01:57 PM	Main Vac valve closed
3/8/2012	6:01:57 PM	Bypass valve closed
3/8/2012	6:01:57 PM	Bubbler valve closed
3/8/2012	6:01:57 PM	Helium valve opened
3/8/2012	6:01:57 PM	Helium MFC set to  500.000000
3/8/2012	6:01:57 PM	H2 MFC set to  0.000000
3/8/2012	6:01:57 PM	BCl3 MFC set to  0.000000
3/8/2012	6:01:57 PM	PH3 MFC set to  0.000000
3/8/2012	6:01:57 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:01:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:01:57 PM	Tube furnace set to 0
3/8/2012	6:01:57 PM	Helium valve closed
3/8/2012	6:01:57 PM	H2 valve closed
3/8/2012	6:01:57 PM	BCl3 valve closed
3/8/2012	6:01:57 PM	PH3 valve closed
3/8/2012	6:01:57 PM	SiCl4 pre valve closed
3/8/2012	6:01:57 PM	SiCl4 post valve closed
3/8/2012	6:01:57 PM	Main Vac valve closed
3/8/2012	6:01:57 PM	Bypass valve closed
3/8/2012	6:01:57 PM	Bubbler valve closed
3/8/2012	6:01:57 PM	Helium MFC set to  0.000000
3/8/2012	6:01:57 PM	H2 MFC set to  0.000000
3/8/2012	6:01:57 PM	BCl3 MFC set to  0.000000
3/8/2012	6:01:57 PM	PH3 MFC set to  0.000000
3/8/2012	6:01:57 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:01:57 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:01:57 PM	Tube furnace set to 0
3/8/2012	6:01:58 PM	Run finished at 6:01 PM
3/8/2012	6:01:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/8/2012	6:11:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/8/2012	6:11:11 PM	Recipe started at 6:11 PM
3/8/2012	6:11:11 PM	Helium valve closed
3/8/2012	6:11:11 PM	H2 valve closed
3/8/2012	6:11:11 PM	BCl3 valve closed
3/8/2012	6:11:11 PM	PH3 valve closed
3/8/2012	6:11:11 PM	SiCl4 pre valve closed
3/8/2012	6:11:11 PM	SiCl4 post valve closed
3/8/2012	6:11:11 PM	Main Vac valve closed
3/8/2012	6:11:11 PM	Bubbler valve closed
3/8/2012	6:11:11 PM	Bypass valve opened
3/8/2012	6:11:11 PM	Helium MFC set to  0.000000
3/8/2012	6:11:11 PM	H2 MFC set to  0.000000
3/8/2012	6:11:11 PM	BCl3 MFC set to  0.000000
3/8/2012	6:11:11 PM	PH3 MFC set to  0.000000
3/8/2012	6:11:11 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:11:11 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:11:12 PM	Tube furnace set to 0
3/8/2012	6:12:16 PM	Helium valve closed
3/8/2012	6:12:16 PM	H2 valve closed
3/8/2012	6:12:16 PM	BCl3 valve closed
3/8/2012	6:12:16 PM	PH3 valve closed
3/8/2012	6:12:16 PM	SiCl4 pre valve closed
3/8/2012	6:12:16 PM	SiCl4 post valve closed
3/8/2012	6:12:16 PM	Main Vac valve closed
3/8/2012	6:12:16 PM	Bubbler valve closed
3/8/2012	6:12:16 PM	Bypass valve opened
3/8/2012	6:12:16 PM	Helium MFC set to  0.000000
3/8/2012	6:12:16 PM	H2 MFC set to  0.000000
3/8/2012	6:12:16 PM	BCl3 MFC set to  0.000000
3/8/2012	6:12:16 PM	PH3 MFC set to  0.000000
3/8/2012	6:12:16 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:12:16 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:12:16 PM	Tube furnace set to 0
3/8/2012	6:13:16 PM	Helium valve closed
3/8/2012	6:13:16 PM	H2 valve closed
3/8/2012	6:13:16 PM	BCl3 valve closed
3/8/2012	6:13:16 PM	PH3 valve closed
3/8/2012	6:13:16 PM	SiCl4 pre valve closed
3/8/2012	6:13:16 PM	SiCl4 post valve closed
3/8/2012	6:13:16 PM	Bypass valve closed
3/8/2012	6:13:16 PM	Bubbler valve closed
3/8/2012	6:13:16 PM	Main Vac valve opened
3/8/2012	6:13:16 PM	Helium MFC set to  0.000000
3/8/2012	6:13:16 PM	H2 MFC set to  0.000000
3/8/2012	6:13:16 PM	BCl3 MFC set to  0.000000
3/8/2012	6:13:16 PM	PH3 MFC set to  0.000000
3/8/2012	6:13:16 PM	SiCl4 MFC set to  0.000000
3/8/2012	6:13:16 PM	Bypass solenoid MFC set to  0.000000
3/8/2012	6:13:16 PM	Tube furnace set to 0
3/8/2012	6:13:17 PM	Run finished at 6:13 PM
3/8/2012	6:13:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
